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Volumn 194, Issue 2, 1998, Pages 173-177
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Lateral ordering of Ge islands along facets
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Author keywords
Ge islands; High index planes; Lateral ordering; LPCVD; Selective epitaxy
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL ORIENTATION;
EPITAXIAL GROWTH;
NUCLEATION;
ORDER DISORDER TRANSITIONS;
SEMICONDUCTING SILICON;
LATERAL ORDERING;
SEMICONDUCTING GERMANIUM;
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EID: 0032476418
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(98)00714-3 Document Type: Article |
Times cited : (29)
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References (24)
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