Photoassisted anodic etching of gallium nitride

Journal of the Electrochemical Society

Volumn 144, Issue 1, 1997, Pages

  Lu, Hongqiang ^a   Wu, Ziming ^a   Bhat, Ishwara ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTROLYTES; FILM GROWTH; GLYCOLS; MIXTURES; ORGANIC ACIDS; PH EFFECTS; PHOTOCHEMICAL REACTIONS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR DOPING; SOLUTIONS; SURFACE ROUGHNESS;

BUFFER; ETHYLENE GLYCOL; GALLIUM NITRIDE; PHOTOASSISTED ANODIC ETCHING; TARTARIC ACID;

ETCHING;

EID: 0030824509     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837355     Document Type: Article

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