Probing plasma/surface interactions

Solid State Technology

Volumn 40, Issue 10, 1997, Pages 181-190

  Aydil, Eray S ^a,c,d   Gottscho, Richard A ^b,e,f  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAM RESEARCH CORPORATION   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d UNIVERSITY OF HOUSTON   (United States)

^e PENNSYLVANIA STATE UNIVERSITY   (United States)

^f LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE CLEANING;

ATTENUATED TOTAL REFLECTION FOURIER TRANSFORM INFRARED SPECTROSCOPY;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0000231329     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

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