ERD-TOF characterization of silicon-compound multilayer and graded-index optical coatings

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 560-565

  Gujrathi, S C ^a   Poitras, D ^b   Klemberg Sapieha, J E ^b   Martinu, L ^b  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

^b ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; DENSITY (OPTICAL); FABRICATION; ION BOMBARDMENT; MICROSTRUCTURE; MULTILAYERS; OPTICAL FILMS; OPTIMIZATION; REFRACTIVE INDEX; SILICON COMPOUNDS;

DEPTH PROFILE; ELASTIC RECOIL DETECTION; GAS FLOW RATIOS; GAS MIXTURES; GRADED INDEX OPTICAL COATINGS; PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION; TIME OF FLIGHT TECHNIQUE;

OPTICAL COATINGS;

EID: 0030565054     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01117-X     Document Type: Article

References (27)

1. R. Jacobson, Proc. SPIE 2046 (1993) 2.
2. R. Jacobson, Phys. Thin Films 8 (1975) 51.
3. W.H. Southwell, J. Opt. Lett. 8 (1983) 584.
4. W.E. Johnson and R.L. Crane, Proc. SPIE 2046 (1993) 88.
5. R. Bertram, M.F. Ouellette and P.Y. Tse, Appl. Opt. 28 (1989) 2935.
6. M.F. Ouellette, R.W. Lang, K.L. Yan, R.W. Bertram, R.S. Owles and D. Vincent, J. Vac. Sci. Technol. A 10 (1992) 1462.
7. P.G. Snyder, Y. Xiang, J.A. Woollam and G.A. Al-Jumaily, J. Vac. Sci. Technol. A 10 (1992) 1462.
8. S. Lim, J.H. Rym, J.F. Wagner and L.M. Cacas, Thin Solid Films 232 (1993) 64.
9. D. Poitras, J.E. Klemberg-Sapieha, A. Moussi and L. Martinu, Proc. SPIE 2046 (1993) 179.
10. L. Martinu, J.E. Klemberg-Sapieha and M.R. Wertheimer, Appl. Phys. Lett. 54 (1989) 2645.
11. J.E. Klemberg-Sapieha, O.M. Kütel, L. Martinu and M.R. Wertheimer, Thin Solid Films 193/194 (1990) 965.
12. L. Martinu and M.R. Wertheimer, in Plasma Properties, Deposition and Etching; Material Science Forum, eds. J. Pouch and S.A. Alterovitz (Trans.-Tech, Zurich) Vois. 140-142 (1993) 405.
13. L. Martinu, J.E. Klemberg-Sapieha, O.M. Kütel, A. Raveh and M.R. Wertheimer, J. Vac. Sci. Technol. A 12 (1994) 1360.
14. J. L'Ecuyer, C. Brassard, C. Cardinal, J. Chabbal, L. Deschênes, J.B. Labrie, B. Terreault, J.G. Mariel and R. St-Jacques, J. Appl. Phys. 47 (1976) 881.
15. R. Groleau, S.C. Gujrathi and J.-P. Martin, Nucl. Instr. and Meth. 218 (1983) 11.
16. S.C. Gujrathi, P. Aubry, L. Lemay and J.-P. Martin, Can. J. Phys. (1987) 950.
17. S.C. Gujrathi, in: Metallization of Polymers, eds. E. Sacher, J.J. Pireaux and S.P. Kowalczyk, ACS Symp. Series no. 440 (1990) chap. 6, p.88.
18. Y. Tessier, J.E. Klemberg-Sapieha, M.R. Wertheimer and S.C. Gujrathi, Can. J. Phys. 65 (1987) 859.
19. E. Bustarret, M. Bensoda, M.C. Habard, J.C. Bruyére, S. Poulin and S.C. Gujrathi, Phys. Rev. B (1988) 8171.
20. S. Blain, J.E. Klemberg-Sapieha, M.R. Wertheimer and S.C. Gujrathi, Can. J. Phys. 67 (1989) 190.
21. K. Oxorn, S.C. Gujrathi, S. Bultena, L. Cliché and J. Miskin, Nucl Instr. and Meth. B 45 (1990) 166.
22. D. Poitras, P. Leroux, J.E. Klemberg-Sapieha, S.C. Gujrathi and L. Martinu, Opt. Eng., to be published.
23. S.C. Gujrathi and S. Bultena, Nucl. Instr. and Meth. B 64 (1992) 789.
24. S. Szilágyi and F. Pászti, Nucl. Instr. and Meth. B 85 (1994) 616.
25. J.R. Bird and J.S. Williams, in: Ion Beam for Material Analysis, eds. J.R. Bird and J.S. Williams (Academic Press, 1989) chap. 12, p.551.
26. P.J. Leurgan, J. Opt. Soc. Am. 41 (1951) 174.
27. B. Tatian, Appl. Opt. 23 (1984) 4477.