Observation of adsorption and reaction of NH3 on crystalline Al2O3 under steady-state conditions using external-reflection infrared spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2572-2580

  Bermudez, V M ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032340646     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581384     Document Type: Article

References (98)

1. A. C. Jones, C. R. Whitehouse, and J. S. Roberts, Chem. Vap. Deposition 1, 3 (1995).
2. D. A. Neumayer and S. G. Ekerdt, Chem. Mater. 8, 9 (1996).
3. A. Ludviksson, D. W. Robinson, and J. W. Rogers, Jr., Thin Solid Films 289, 6 (1996).
4. J. N. Kidder, Jr., J. S. Kuo, A. Ludviksson, T. P. Pearsall, J. W. Rogers, Jr., J. M. Grant, L. R. Allen, and S. T Hsu, J. Vac. Sci. Technol. A 13, 711 (1995).
5. D. C. Bertolet, H. Liu, and J. W. Rogers, Jr., J. Appl. Phys. 75, 5385 (1994).
6. H. Liu, D. C. Bertolet, and J. W. Rogers, Jr., Surf. Sci. 340, 88 (1995); 320, 145 (1994).
7. H. Liu, D. C. Bertolet, and J. W. Rogers, Jr., Surf. Sci. 340, 88 (1995); 320, 145 (1994).
8. D. C. Bertolet, H. Liu, and J. W. Rogers, Jr., Chem. Mater. 5, 1814 (1993); D. C. Bertolet and J. W. Rogers, Jr., ibid. 5, 391 (1993).
9. D. C. Bertolet, H. Liu, and J. W. Rogers, Jr., Chem. Mater. 5, 1814 (1993); D. C. Bertolet and J. W. Rogers, Jr., ibid. 5, 391 (1993).
10. M. E. Bartram, T. A. Michalske, J. W. Rogers, Jr., and R. T. Paine, Chem. Mater. 5, 1424 (1993); M. E. Bartram, T. A. Michalske, J. W. Rogers, Jr., and T. M. Mayer, ibid. 3, 953 (1991); M. E. Bartram, T. A. Michalske, and J. W. Rogers, Jr., J. Phys. Chem. 95, 4453 (1991).
11. M. E. Bartram, T. A. Michalske, J. W. Rogers, Jr., and R. T. Paine, Chem. Mater. 5, 1424 (1993); M. E. Bartram, T. A. Michalske, J. W. Rogers, Jr., and T. M. Mayer, ibid. 3, 953 (1991); M. E. Bartram, T. A. Michalske, and J. W. Rogers, Jr., J. Phys. Chem. 95, 4453 (1991).
12. M. E. Bartram, T. A. Michalske, J. W. Rogers, Jr., and R. T. Paine, Chem. Mater. 5, 1424 (1993); M. E. Bartram, T. A. Michalske, J. W. Rogers, Jr., and T. M. Mayer, ibid. 3, 953 (1991); M. E. Bartram, T. A. Michalske, and J. W. Rogers, Jr., J. Phys. Chem. 95, 4453 (1991).
13. C. Soto, V. Boiadjiev, and W. T. Tysoe, Chem. Mater. 8, 2359 (1996).
14. J. L. Dupuie and E. Gulari, J. Vac. Sci. Technol. A 10, 18 (1992).
15. M. K. Weldon and C. M. Friend, Rev. Sci. Instrum. 66, 5192 (1995).
16. A. Tripathi, D. Mazzarese, W. C. Conner, and K. A. Jones, J. Electron. Mater. 18, 45 (1989).
17. Y. Yamauchi, K. Uwai, and N. Kobayashi, Jpn. J. Appl. Phys., Part 2 35, L80 (1996); K. Uwai, Y. Yamauchi, and N. Kobayashi, Appl. Surf. Sci. 100/101, 412 (1996).
18. Y. Yamauchi, K. Uwai, and N. Kobayashi, Jpn. J. Appl. Phys., Part 2 35, L80 (1996); K. Uwai, Y. Yamauchi, and N. Kobayashi, Appl. Surf. Sci. 100/101, 412 (1996).
19. D. Mazzarese, K. A. Jones, and W. C. Conner, J. Electron. Mater. 21, 329 (1992).
20. B. H. Weiller, Mater. Res. Soc. Symp. Proc. 282, 605 (1993).
21. S. Salim, K. F. Jensen, and R. D. Driver, Mater. Res. Soc. Symp. Proc. 324, 241 (1994).
22. G. A. Beitel, A. Laskov, H. Oosterbeek, and E. W. Kuipers, J. Phys. Chem. 100, 12494 (1996); G. A. Beitel, C. P. M. de Groot, H. Oosterbeek, and J. H. Wilson, J. Phys. Chem. B 101, 4035 (1997).
23. G. A. Beitel, A. Laskov, H. Oosterbeek, and E. W. Kuipers, J. Phys. Chem. 100, 12494 (1996); G. A. Beitel, C. P. M. de Groot, H. Oosterbeek, and J. H. Wilson, J. Phys. Chem. B 101, 4035 (1997).
24. T. Wadayama, Y. Maiwa, H. Shibata, and A. Hatta, Appl. Surf. Sci. 100/101, 575 (1996); Jpn. J. Appl. Phys., Part 2 34, L779 (1995).
25. T. Wadayama, Y. Maiwa, H. Shibata, and A. Hatta, Appl. Surf. Sci. 100/101, 575 (1996); Jpn. J. Appl. Phys., Part 2 34, L779 (1995).
26. T. Wadayama, H. Shibata, T. Ohtani, and A. Hatta, Appl. Phys. Lett. 61, 1060 (1992); Appl. Surf. Sci. 78, 93 (1994); Thin Solid Films 250, 81 (1994).
27. T. Wadayama, H. Shibata, T. Ohtani, and A. Hatta, Appl. Phys. Lett. 61, 1060 (1992); Appl. Surf. Sci. 78, 93 (1994); Thin Solid Films 250, 81 (1994).
28. T. Wadayama, H. Shibata, T. Ohtani, and A. Hatta, Appl. Phys. Lett. 61, 1060 (1992); Appl. Surf. Sci. 78, 93 (1994); Thin Solid Films 250, 81 (1994).
29. T. Wadayama, W. Suëtaka, and A. Sekiguchi, Jpn. J. Appl. Phys., Part 1 27, 501 (1988); T. Wadayama, H. Kayama, A. Hatta, W. Suëtaka, and J. Hanna, ibid. 29, 1884 (1990).
30. T. Wadayama, W. Suëtaka, and A. Sekiguchi, Jpn. J. Appl. Phys., Part 1 27, 501 (1988); T. Wadayama, H. Kayama, A. Hatta, W. Suëtaka, and J. Hanna, ibid. 29, 1884 (1990).
31. T. Wadayama, T. Hihara, A. Hatta, and W. Suëtaka, Appl. Surf. Sci. 48/49, 409 (1991); T. Wadayama, H. Shibata, T. Kobayashi, and A. Hatta, J. Mater. Sci. 29, 1041 (1994),
32. T. Wadayama, T. Hihara, A. Hatta, and W. Suëtaka, Appl. Surf. Sci. 48/49, 409 (1991); T. Wadayama, H. Shibata, T. Kobayashi, and A. Hatta, J. Mater. Sci. 29, 1041 (1994),
33. Handbook of Optical Constants II, edited by E. D. Palik (Academic, Boston, 1991).
34. H. Kawakami, H. Sakurai, K. Tsubouchi, and N. Mikoshiba, Jpn. J. Appl. Phys., Part 2 27, L161 (1988); K. Masu, Y. Nakamura, T. Yamazaki, T. Shibata, M. Takahashi, and K. Tsubouchi, ibid. 34, L760 (1995); T. Suetsugu, T. Yamazaki, S. Tomabechi, K. Wada, K. Masu and K. Tsubouchi, Appl. Surf. Sci. 117/118, 540 (1997).
35. H. Kawakami, H. Sakurai, K. Tsubouchi, and N. Mikoshiba, Jpn. J. Appl. Phys., Part 2 27, L161 (1988); K. Masu, Y. Nakamura, T. Yamazaki, T. Shibata, M. Takahashi, and K. Tsubouchi, ibid. 34, L760 (1995); T. Suetsugu, T. Yamazaki, S. Tomabechi, K. Wada, K. Masu and K. Tsubouchi, Appl. Surf. Sci. 117/118, 540 (1997).
36. H. Kawakami, H. Sakurai, K. Tsubouchi, and N. Mikoshiba, Jpn. J. Appl. Phys., Part 2 27, L161 (1988); K. Masu, Y. Nakamura, T. Yamazaki, T. Shibata, M. Takahashi, and K. Tsubouchi, ibid. 34, L760 (1995); T. Suetsugu, T. Yamazaki, S. Tomabechi, K. Wada, K. Masu and K. Tsubouchi, Appl. Surf. Sci. 117/118, 540 (1997).
37. A. Yamamoto, M. Tsujino, M. Ohkubo, and A. Hashimoto, J. Cryst. Growth 137, 415 (1994).
38. S. Keller, B. P. Keller, Y.-F. Wu, B. Heying, D. Kapolnek, J. S. Speck, U. K. Mishra, and S. P. DenBaars, Appl. Phys. Lett. 68, 1525 (1996).
39. K. Uchida, A. Watanabe, F. Yano, M. Kougouchi, T. Tanaka, and S. Minagawa, J. Appl. Phys. 79, 3487 (1996); 80, 1942 (1996).
40. K. Uchida, A. Watanabe, F. Yano, M. Kougouchi, T. Tanaka, and S. Minagawa, J. Appl. Phys. 79, 3487 (1996); 80, 1942 (1996).
41. N. Grandjean, J. Massies, and M. Leroux, Appl. Phys. Lett. 69, 2071 (1996); N. Grandjean, J. Massies, Y. Martinez, P. Vennéguès, M. Leroux, and M. Laügt, J. Cryst. Growth 178, 220 (1997).
42. N. Grandjean, J. Massies, and M. Leroux, Appl. Phys. Lett. 69, 2071 (1996); N. Grandjean, J. Massies, Y. Martinez, P. Vennéguès, M. Leroux, and M. Laügt, J. Cryst. Growth 178, 220 (1997).
43. W. Kim, M. Yeadon, A. E. Botchkarev, S. N. Mohammad, J. M. Gibson, and H. Morkoç, J. Vac. Sci. Technol. B 15, 921 (1997).
44. O. Kubaschewski and C. B. Alcock, Metallurgical Thermochemistry, 5th ed. (Pergamon. Oxford, 1979).
45. J. E. Crowell, J. G. Chen, and J. T. Yates, Jr., Surf. Sci. 165, 37 (1986).
46. P. J. Chen, M. L. Colaianni, and J. T. Yates, Jr., Phys. Rev. B 41, 8025 (1990).
47. MaTeCK Material-Technologie & Kristalle GmbH: Karl-Heinz-Beckurts-Strasse 13, D-52428 Jülich, Germany.
48. R. Franchy, J. Masuch, and P. Gassmann, Appl. Surf. Sci. 93, 317 (1996).
49. V. M. Bermudez, J. Vac. Sci. Technol. A 10, 152 (1992).
50. Y. Kobayashi and T. Ogino. Surf. Sci. 368, 102 (1996); Appl. Surf. Sci. 100/101, 407 (1996).
51. Y. Kobayashi and T. Ogino. Surf. Sci. 368, 102 (1996); Appl. Surf. Sci. 100/101, 407 (1996).
52. Y. Wu, E. Garfunkel, and T. E. Madey, J. Vac. Sci. Technol. A 14, 2554 (1996).
53. M. Ohkubo, N. Suzuki, and T. Hioki, Appl. Phys. Lett. 56, 2631 (1990).
54. S. A. Chambers, Y. Gao, and Y. Liang, Surf. Sci. 339, 297 (1995).
55. P. Gassmann, F. Bartolucci, and R. Franchy, J. Appl. Phys. 77, 5718 (1995); P. Gassmann, J. Boysen, G. Schmitz, F. Bartolucci, and R. Franchy, Solid State Commun. 97, 1 (1996); P. Gassmann, G. Schmitz, J. Boysen, F. Bartolucci, and R. Franchy, J. Vac. Sci. Technol. A 14, 813 (1996).
56. P. Gassmann, F. Bartolucci, and R. Franchy, J. Appl. Phys. 77, 5718 (1995); P. Gassmann, J. Boysen, G. Schmitz, F. Bartolucci, and R. Franchy, Solid State Commun. 97, 1 (1996); P. Gassmann, G. Schmitz, J. Boysen, F. Bartolucci, and R. Franchy, J. Vac. Sci. Technol. A 14, 813 (1996).
57. P. Gassmann, F. Bartolucci, and R. Franchy, J. Appl. Phys. 77, 5718 (1995); P. Gassmann, J. Boysen, G. Schmitz, F. Bartolucci, and R. Franchy, Solid State Commun. 97, 1 (1996); P. Gassmann, G. Schmitz, J. Boysen, F. Bartolucci, and R. Franchy, J. Vac. Sci. Technol. A 14, 813 (1996).
58. P. Gassmann, G. Schmitz, and R. Franchy, Surf. Sci. 380, L459 (1997).
59. P. Hollins and J. Pritchard, J. Vac. Sci. Technol. 17, 665 (1980).
60. C. T. Campbell and S. M. Valone, J. Vac. Sci. Technol. A 3, 408 (1985).
61. R. G. Greenler, J. Vac. Sci. Technol. 12, 1410 (1975).
62. R. Franchy, M. Wuttig, and H. Ibach, Surf. Sci. 189/190, 438 (1987).
63. D. M. Zehner and G. R. Gruzalski, Mater. Res. Soc. Symp. Proc. 83, 199 (1987).
64. J. P. Roux and H. J. Grabke, Appl. Surf. Sci. 68, 49 (1993).
65. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 17, 927 (1991).
66. R. W. G. Wyckoff, Crystal Structures, 2nd ed. (Wiley-Interscience, New York, 1965), Vol. 3.
67. J. G. Chen, J. E. Crowell, and J. T. Yates, Jr., Phys. Rev. B 33, 1436 (1986).
68. J. Shen, R. D. Cortright, Y. Chen, and J. A. Dumesic, J. Phys. Chem. 98, 8067 (1994).
69. T. A. Gordymova and A. A. Davydov, Zh. Prikl. Spektrosk. 39, 621 (1982) [J. Appl. Spectrosc. 39, 1167 (1983)].
70. T. A. Gordymova and A. A. Davydov, Zh. Prikl. Spektrosk. 39, 621 (1982) [J. Appl. Spectrosc. 39, 1167 (1983)].
71. J. E. Parmenter, Y. Wang, C. B. Mullins, and W. H. Weinberg, J. Chem. Phys. 88, 5225 (1988).
72. S. Picaud, A. Lakhlifi, and C. Girardet, J. Chem. Phys. 98, 3488 (1993).
73. A. Hoffman, T. Maniv, and M. Folman, Surf. Sci. 183, 484 (1987); 193, 513 (1988).
74. A. Hoffman, T. Maniv, and M. Folman, Surf. Sci. 183, 484 (1987); 193, 513 (1988).
75. F. Bartolucci, G. Schmitz, P. Gassmann, and R. Franchy, J. Appl. Phys. 80, 6467 (1996).
76. J. N. Russell, Jr., V. M. Bermudez, and A. Leming, J. Vac. Sci. Technol. A 14, 908 (1996).
77. J. W. Rogers, Jr., C. T. Campbell, R. L. Hance, and J. M. White, Surf. Sci. 97, 425 (1980).
78. R. Payling, J. Electron Spectrosc. Relat. Phenom. 36, 99 (1985).
79. S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instrum. 40, 761 (1969); 41, 152 (1970).
80. S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instrum. 40, 761 (1969); 41, 152 (1970).
81. L. A. Nafie, in Advances in Applied Fourier Transform Infrared Spectroscopy, edited by M. W. Mackenzie (Wiley, New York, 1988), p. 67.
82. A. E. Dowrey and C. Marcott, Appl. Spectrosc. 36, 414 (1982).
83. W. G. Golden, D. D. Saperstein, M. W. Severson, and J. Overend, J. Phys. Chem. 88, 574 (1984); W. G. Golden, in Fourier Transform Infrared Spectroscopy, edited by J. R. Ferraro and L. J. Basile (Academic, New York, 1985), Vol. 4, p. 315.
84. W. G. Golden, D. D. Saperstein, M. W. Severson, and J. Overend, J. Phys. Chem. 88, 574 (1984); W. G. Golden, in Fourier Transform Infrared Spectroscopy, edited by J. R. Ferraro and L. J. Basile (Academic, New York, 1985), Vol. 4, p. 315.
85. T. Buffeteau, B. Desbat, and J. M. Turlet, Appl. Spectrosc. 45, 380 (1991).
86. B. J. Barner, M. J. Green, E. I. Sáez, and R. M. Corn, Anal. Chem. 63, 55 (1991); M. J. Green, B. J. Barner, and R. M. Corn, Rev. Sci. Instrum. 62, 1426 (1991).
87. B. J. Barner, M. J. Green, E. I. Sáez, and R. M. Corn, Anal. Chem. 63, 55 (1991); M. J. Green, B. J. Barner, and R. M. Corn, Rev. Sci. Instrum. 62, 1426 (1991).
88. Lock-in amplifier, model SR510 (Stanford Research Systems) with minimum output time constant reduced to ∼50 μs, as per manufacturer's instructions. Band pass filter: model 4302 (Ithaco); modulator: PEM-80 (Hinds Instruments); FTIR: Cygnus 100 (Mattson Instruments).
89. P. R. Griffiths and J. A. de Haseth, Fourier Transform Infrared Spectrometry (Wiley, New York, 1986).
90. E. D. Lipp and L. A. Nafie, Appl. Spectrosc. 38, 20 (1984).
91. D. B. Chase, Appl. Spectrosc. 38, 491 (1984).
92. R. O. Carter III, N. E. Lindsay, and D. Beduhn, Appl. Spectrosc. 44, 1147 (1990).
93. I. I. Sasovskaya and M. M. Noskov, Fiz. Metal. Metalloved. 28, 454 (1969) [Phys. Met. Metallogr. 28, 71 (1969).
94. I. I. Sasovskaya and M. M. Noskov, Fiz. Metal. Metalloved. 28, 454 (1969) [Phys. Met. Metallogr. 28, 71 (1969).
95. A. Canillas, E. Pascual, and E. Bertran, J. Opt. Soc. Am. A 13, 2461 (1996).
96. J. C. Cheng, L. A. Nafie, S. D. Allen, and A. I. Braunstein, Appl. Opt. 15, 1960 (1976).
97. G. G. Hoffmann, B. Schrader, and G. Snatzke, Rev. Sci. Instrum. 58, 1675 (1987).
98. Z. Xu and J. T. Yates, Jr., J. Vac. Sci. Technol. A 8, 3666 (1990).