Angle-variable infrared external reflection spectroscopy in UHV and its application to the observation of Si-H vibrations on Si(001) substrates with a buried metal layer

Surface Science

Volumn 368, Issue 1-3, 1996, Pages 102-107

  Kobayashi, Yoshihiro ^a   Ogino, Toshio ^a  

^a NTT Basic Research Laboratories   (Japan)

Author keywords

Hydrides; Hydrogen; Infrared absorption spectroscopy; Low index single crystal surfaces; Silicides; Silicon; Surface chemical reaction

Indexed keywords

ADSORPTION; CHEMICAL REACTIONS; HYDROGEN; METALLIC FILMS; MOLECULAR ORIENTATION; MOLECULAR VIBRATIONS; SEMICONDUCTING SILICON; SUBSTRATES; SURFACE STRUCTURE; SURFACES;

BURIED METAL LAYER; INFRARED ABSORPTION SPECTROSCOPY; LOW INDEX SINGLE CRYSTAL SURFACES; VARIABLE ANGLE MECHANISM;

INFRARED SPECTROSCOPY;

EID: 0030414434     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(97)80024-6     Document Type: Article

References (30)

1. R.G. Greenler, J. Chem. Phys. 44 (1966) 310.
2. F.M. Hoffman, Surf. Sci. Rep. 3 (1983) 107.
3. Y.J. Chabal, Surf. Sci. Rep. 8 (1988) 211.
4. M.D. Porter, T.B. Bright, D.L. Allara and T. Kuwana, Anal. Chem. 58 (1986) 2461.
5. Y.S. Yen and J.S. Wong, J. Phys. Chem. 93 (1989) 7208.
6. J.A. Mielczarski and R.H. Yoon, J. Phys. Chem. 93 (1989) 2034.
7. J.A. Mielczarski, J. Phys. Chem. 97 (1993) 2649.
8. A. Borg, P. Apell and O. Hunderi, Superlatt. Microstruct. 3 (1987) 103.
9. S.J. Finke and G.L. Schrader, Spectrochim. Acta 46A (1990) 91.
10. V.M. Bermudez and S.M. Prokes, Surf. Sci. 248 (1991) 201.
11. V.M. Bermudez, J. Vac. Sci. Technol. A 10 (1992) 152.
12. V.M. Bermudez, J. Vac. Sci. Technol. A 10 (1992) 3478.
13. W. Erley, R. Butz and S. Mantl, Surf. Sci. 248 (1991) 193.
14. S. Mantl, Mater. Sci. Rep. 8 (1992) 1.
15. Y. Kobayashi, K. Sumitomo, K. Prabhakaran and T. Ogino, J. Vac. Sci. Technol. A, 14 (1996) 2263.
16. A. Yoshigoe, K. Mase, Y. Tsusaka, T. Urisu, Y. Kobayashi and T. Ogino, Appl. Phys. Lett. 67 (1995) 2364.
17. A. Yoshigoe, M. Nagasono, K. Mase and T. Urisu, Jpn. J. Appl. Phys. 34 (1995) 6894.
18. Y. Kobayashi and T. Ogino, Appl. Surf. Sci. 100/101 (1996) 407.
19. Y.J. Chabal and K. Raghavachari, Phys. Rev. Lett. 53 (1984) 282.
20. Y.J. Chabal, Phys. Rev. Lett. 54 (1985) 1055.
21. Y.J. Chabal, Surf. Sci. 168 (1986) 594.
22. H. Froitzheim, U. Köhler and H. Lammering, Surf. Sci. 149 (1985) 537.
23. J.J. Boland, Surf. Sci. 261 (1992) 17.
24. R.G. Nuzzo, F.A. Fusco and D.L. Allara, J. Am. Chem. Soc. 109 (1987) 2358.
25. W.N. Hansen, J. Opt. Soc. Am. 58 (1968) 380.
26. J.D.E. McIntyre, in: Advances in Electrochemistry and Electrochemical Engineering, Vol. 9, Ed. R.H. Muller (Wiley, New York, 1973) p. 61.
27. G. Lucovsky, R.J. Nemanich and J.C. Knights, Phys. Rev. B 19 (1979) 2064.
28. Y. Ogata, H. Niki, T. Sakka and M. Iwasaki, J. Electrochem. Soc. 142 (1995) 195.
29. Y. Wei, L. Li and I.S.T. Tsong, Appl. Phys. Lett. 66 (1995) 1818.
30. K. Raghavachari, P. Jakob and Y.J. Chabal, Chem. Phys. Lett. 206 (1993) 156.