Spectroscopic study of AlN film formation by the sequential reaction of ammonia and trimethylaluminum on alumina

Chemistry of Materials

Volumn 8, Issue 9, 1996, Pages 2359-2365

  Soto, C ^a,b   Boiadjiev, V ^a   Tysoe, W T ^a  

^a UNIVERSITY OF WISCONSIN MILWAUKEE   (United States)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343647260     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm9601906     Document Type: Article

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