Study of thin film deposition processes employing variable kinetic energy, highly collimated neutral molecular beams

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3423-3433

  Roadman, S E ^a   Maity, N ^a   Carter, J N ^a   Engstrom, J R ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032328253     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581497     Document Type: Article

References (45)

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