Surface morphology of homoepitaxial silicon thin films grown using energetic supersonic jets of disilane

Applied Physics Letters

Volumn 69, Issue 8, 1996, Pages 1110-1112

  Pacheco, K A ^a   Ferguson, B A ^a   Banerjee, S ^a   Mullins, C B ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011746961     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117074     Document Type: Article

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