New fabrication method for micro actuators with piezoelectric thin film using precision cutting technique

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 307-311

  Yamagata, Y ^a   Mihara, S ^a   Nishioki, N ^a   Higuchi, T ^a  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CUTTING; LASER ABLATION; MACHINE TOOLS; MICROELECTRONICS; MICROMACHINING; PIEZOELECTRIC MATERIALS; PRECISION ENGINEERING; SOLID STATE LASERS; THIN FILMS; THREE DIMENSIONAL;

ELECTRODE PATTERNING; HYDROTHERMAL METHOD; MICRO PARTS FABRICATION; MICRO STRUCTURES; MICRO VIBRATION GYRO; MICROACTUATORS; PIEZOELECTRIC THIN FILMS; PRECISION CUTTING;

MICROELECTRONIC PROCESSING;

EID: 0029732975     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)