A study on silicon damages and ultra-low energy ion implantation using classical molecular dynamics

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Kang, Jeong Won ^a   Son, Myung Sik ^a   Kang, Eu Seok ^a   Hwang, Ho Jung ^a  

^a Chung Ang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032257261     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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