Damage evolution and surface defect segregation in low-energy ion-implanted silicon

Applied Physics Letters

Volumn 70, Issue 2, 1997, Pages 176-178

  Bedrossian, P J ^a   Caturla, M J ^a   Diaz De La Rubia, T ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001483104     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118349     Document Type: Article

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