MEMS on bulk mechanical contour substrates

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1431-1434

  Li, Wen J ^a   Ho, Chih Ming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; DEPOSITION; INTERFEROMETERS; LITHOGRAPHY; MICROSTRUCTURE; SUBSTRATES; THIN FILMS;

CONTOUR SUBSTRATE; WHITE LIGHT INTERFEROMETER;

MICROELECTROMECHANICAL DEVICES;

EID: 0030654963     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)