Flexure-beam micromirror devices and potential expansion for smart micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 20-29

  Lin, Tsen Hwang ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLEXURE-BEAM MICROMIRRORS; MICROACTUATORS; MICROSENSORS;

ACTUATORS; ANALOG TO DIGITAL CONVERSION; DIGITAL TO ANALOG CONVERSION; INTELLIGENT STRUCTURES; MIRRORS; OPTICAL SENSORS;

MICROMACHINING;

EID: 0029766692     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)