Investigations on structural properties of carbon nitride films synthesized by reactive ionized cluster beam deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 122, Issue 2, 1997, Pages 239-243

  Xie, J Q ^a   Zheng, Y ^a   Feng, J Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INORGANIC COMPOUNDS; ION BEAMS; PHASE COMPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRUCTURE (COMPOSITION); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CARBON NITRIDE FILMS; IONIZED CLUSTER BEAMS;

NITRIDES;

EID: 0031078089     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00776-8     Document Type: Article

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