Evidence for inelastic processes for N3+ and N4+ from ion energy distributions in He/N2 radio frequency glow discharges

Journal of Applied Physics

Volumn 79, Issue 1, 1996, Pages 93-98

  Hwang, Helen H ^a   Olthoff, James K ^b   Van Brunt, Richard J ^b   Radovanov, Svetlana B ^b   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042823748     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360795     Document Type: Article

References (22)

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