Synthesis of high quality crystalline C-N films on silicon

Modern Physics Letters B

Volumn 10, Issue 12, 1996, Pages 567-571

  Chen, Yan ^a   Wang, E G ^a   Chen, Feng ^a   Guo, Liping ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001078231     PISSN: 02179849     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0217984996000626     Document Type: Article

References (18)

1. M. L. Cohen, Phys. Rev. B32, 7988 (1985).
2. A. Y. Liu and M. L. Cohen, Science 245, 841 (1989).
3. H. Han and B. J. Feldman, Solid State Commun. 65, 921 (1988).
4. J. J. Cuomo, P. A. Leary, D. Yu, W. Reuter, and M. Frisch, J. Vac. Sci. & Tech. 16, 299 (1989).
5. C. S. Torng, J. M. Sivertsen, J. H. Jundy, and C. Chang, J. Mater. Res. 5, 2490 (1990).
6. D. Li, Y.-W. Chung and W. D. Sproul, J. Appl. Phys. 74, 219 (1993).
7. M. Y. Chen, D. Li, X. Lin, V. P. Dravid, Y.-W. Chung, M.-S. Wong, and W. D. Sproul, J. Vac. Sci. & Tech. A11, 521 (1993).
8. E. E. Haller, M. L. Cohen, and W. L. Hansers, "Hard carbon nitrogen and method for preparing sane", May 5, 1992, U.S. Patent 5, 110, 679.
9. D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, Phys. Rev. Lett. 73, 118 (1994).
10. C. Niu, Y. Z. Lu, and C. M. Leiber, Science 261, 334 (1993).
11. W. Zhu, F. R. Sivazlian, B. R. Stoner, J. T. Glass, J. Mater. Res. 10, 425 (1995).
12. A. Badzian, T. Badzian, and S.-T. Lee, Appl. Phys. Lett. 62, 3432 (1993).
13. L. Maya, D. R. Cole, and E. W. Hagaman, J. Am. Ceram. Soc. 74, 1686 (1991).
14. Z. J. Zhang, S. S. Fan, and C. M. Lieber, Appl. Phys. Lett. 66, 3582 (1995).
15. 4 transitional layers may be formed at interface, which lead to the increase of the N:C ratio in AES analysis. More detailed Raman, AES, and TEM results will be given in a following paper.
16. S. A. Solin and A. K. Radas, Phys. Rev. B1, 1687 (1970).
17. D. W. Feldman, J. H. Parker, Jr., W. J. Choyke, and L. Patrik, Phys. Rev. 173, 787 (1968).
18. D. M. Teter and R. J. Hemley, Science 271, 53 (1996).