Integrated thermal-conductivity vacuum sensor

Sensors and Actuators, A: Physical

Volumn 58, Issue 1, 1997, Pages 37-42

  Klaassen, Erno H ^a   Kovacs, Gregory T A ^a  

^a Stanford University   (United States)

Author keywords

Integrated sensors; Thermal conductivity vacuum sensors

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED CONTROL; SEMICONDUCTING SILICON; TEMPERATURE CONTROL; THERMAL CONDUCTIVITY; VACUUM GAGES;

INTEGRATED SENSORS; VACUUM SENSOR;

SILICON SENSORS;

EID: 0030677236     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80222-1     Document Type: Article

References (10)

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