An efficient monte carlo simulator for low-pressure RF plasmas

IEEE Transactions on Plasma Science

Volumn 25, Issue 5, 1997, Pages 1081-1085

  Ardehali, Mohammad ^a   Matsumoto, Hiroshi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

Particle in cell monte carlo simulation; Plasma sheath; Split technique; Statistical noise

Indexed keywords

COMPUTER SIMULATION; MONTE CARLO METHODS; PLASMA SHEATHS;

PARTICLE IN CELL/MONTE CARLO PLASMA SIMULATOR;

PLASMA SIMULATION;

EID: 0031250536     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.649629     Document Type: Article

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