Comparison of experimental measurements and model predictions for radio-frequency Ar and SF6discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 7, Issue 3, 1989, Pages 1001-1006

  Gogolides, Evangelos ^a   Nicolai, Jean Philippe ^a   Sawin, Herbert H ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000980672     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576219     Document Type: Article

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