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Journal of Applied Physics

Volumn 72, Issue 9, 1992, Pages 3971-3987

Continuum modeling of radio-frequency glow discharges. I. Theory and results for electropositive and electronegative gases

(2) Gogolides, Evangelos a Sawin, Herbert H a

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449001192 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.352250 Document Type: Article

Times cited : (192)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.