Laser reactive ablation deposition of carbon nitride thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2789, Issue , 1996, Pages 293-304

  Luches, Armando ^a   Caricato, A P ^a   Leggieri, Gilberto ^a   Martino, Maurizio ^a   Perrone, Alessio ^a   Barucca, G ^a   Mengucci, Paolo ^a   Zemek, Joseph ^a  

^a UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; HIGH POWER LASERS; LASER REACTIVE ABLATION; XENON CHLORIDE LASERS;

AMORPHOUS MATERIALS; CERAMIC COATINGS; SEMICONDUCTING SILICON; THIN FILMS;

LASER ABLATION;

EID: 0030349931     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (18)