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Volumn 37, Issue 10-11, 1997, Pages 1771-1781

High performance microsystem packaging: A perspective

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MULTICHIP MODULES; RELIABILITY; SEMICONDUCTING SILICON;

EID: 0031246426     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(97)00158-3     Document Type: Article
Times cited : (21)

References (19)
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  • 9
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    • Lemkin, M., Ortiz, N., Wongkomet, B., Boser, B., and Smith, J., "A Three-Axis Surface Micromachined Sigma-Delta Accelerometer", Proc. ISSCC, pp. 202-203, Feb. 1997.
    • (1997) Proc. ISSCC , pp. 202-203
    • Lemkin, M.1    Ortiz, N.2    Wongkomet, B.3    Boser, B.4    Smith, J.5
  • 12
    • 0001067943 scopus 로고    scopus 로고
    • Micromachined sensor and actuator research at Sandia's Microelectronics Development Laboratory
    • J. Smith, April
    • Smith, J., "Micromachined Sensor and Actuator Research at Sandia's Microelectronics Development Laboratory", J. Smith, Proc. Sensors Expo Anaheim '96, pp. 119-123, April, 1996.
    • (1996) Proc. Sensors Expo Anaheim '96 , pp. 119-123
    • Smith, J.1
  • 13
    • 0029767189 scopus 로고    scopus 로고
    • Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators
    • Feb.
    • Smith, J., Carson, R., Sullivan, C., and McClellan, G., "Monolithic Integration of Waveguide Structures with Surface-Micromachined Polysilicon Actuators", SPIE Smart Electronics and MEMS, vol. 2722, pp. 75-81, Feb. 1996.
    • (1996) SPIE Smart Electronics and MEMS , vol.2722 , pp. 75-81
    • Smith, J.1    Carson, R.2    Sullivan, C.3    McClellan, G.4
  • 14
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    • Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators
    • Oct.
    • Smith, J., Montague, S., and Sniegowski, J., "Material and Processing Issues for the Monolithic Integration of Microelectronics with Surface-Micromachined Polysilicon Sensors and Actuators", SPIE Micromachining and Microfabrication '95, vol. 2639, pp. 64-73, Oct. 1995.
    • (1995) SPIE Micromachining and Microfabrication '95 , vol.2639 , pp. 64-73
    • Smith, J.1    Montague, S.2    Sniegowski, J.3
  • 15
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    • Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
    • Oct.
    • Smith, J., Montague, S., Sniegowski, J., Manginell, R., McWhorter, P, and Huber, R., "Characterization of the Embedded Micromechanical Device Approach to the Monolithic Integration of MEMS with CMOS", SPIE vol. 2879, Oct. 1996.
    • (1996) SPIE , vol.2879
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  • 18
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.