Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 306-314

  Smith, James H ^a   Montague, Stephen ^a   Sniegowski, Jeffry J ^a   Murray, James R ^a   Manginell, Ronald P ^a   McWhorter, Paul J ^a   Huber, Robert J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMECHANICAL DEVICES; POLYSILICON;

ANNEALING; CHARACTERIZATION; CMOS INTEGRATED CIRCUITS; ELECTRONICS PACKAGING; MANUFACTURE; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTING SILICON; SIGNAL PROCESSING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030420697     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)