Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 75-81

  Smith, James H ^a   Carson, Richard F ^a   Sullivan, C T ^a   McClellan, G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYSILICON;

ACTUATORS; MICROMACHINING; OPTICAL SENSORS; OPTICAL WAVEGUIDES; SEMICONDUCTING SILICON;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 0029767189     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)