Laser linking of metal interconnects: Analysis and design considerations

IEEE Transactions on Electron Devices

Volumn 43, Issue 3, 1996, Pages 402-410

  Shen, Yu Lin ^a   Süresh, Subra ^b   Bernstein, Joseph B ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; DIELECTRIC MATERIALS; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; LOGIC GATES; METALLIZING; NUCLEATION; NUMERICAL ANALYSIS; PASSIVATION; PULSED LASER APPLICATIONS; THERMAL EXPANSION;

LASER LINKING; LINK FORMING TISSUE; METAL INTERCONNECTS; PARAMETRIC ANALYSIS; PROGRAMMABLE GATE ARRAYS;

LASER BEAM CUTTING;

EID: 0030107881     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.485653     Document Type: Article

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