Atomic force microscopy study of microcrystalline SiC fabricated by ion beam synthesis

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 968-973

  Wu, W ^a   Chen, D H ^a   Xu, J B ^a   Cheung, W Y ^a   Wong, S P ^a   Wilson, I H ^a   Kwok, R W M ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006384303     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581280     Document Type: Article

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