Evidence for the appearance of carbon-rich layer at the interface of SiC film/Si substrate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 18-20

  Sonoda, Nobuo ^a   Sun, Yong ^b   Miyasato, Tatsuro ^b  

^a Qual Eval and Chem Anal Dept   (Japan)

^b KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031542704     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580463     Document Type: Article

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