Angle resolved X-ray photoelectron spectroscopic study of ultrathin oxynitrides

Materials Science in Semiconductor Processing

Volumn 2, Issue 3, 1999, Pages 225-231

  Kawase, K ^a   Tanimura, J ^a   Kurokawa, H ^a   Kobayashi, K ^a   Teramoto, A ^a   Ogata, T ^a   Inoue, M ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005949181     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(99)00019-0     Document Type: Article

References (23)

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