Nanoscale temperature distributions measured by scanning joule expansion microscopy

Journal of Heat Transfer

Volumn 120, Issue 2, 1998, Pages 297-305

  Majumdar, A ^a   Varesi, J ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California   (United States)

Author keywords

Measurement techniques; Microscale; Microstructures; Nanoscale; Temperature

Indexed keywords

ATOMIC FORCE MICROSCOPY; FREQUENCY RESPONSE; INFRARED IMAGING; MICROSCOPIC EXAMINATION; PLASTIC COATINGS; SUBSTRATES; TEMPERATURE MEASUREMENT; THERMAL EXPANSION; THERMOANALYSIS; WIRE;

SCANNING JOULE EXPANSION MICROSCOPY (SJEM);

TEMPERATURE DISTRIBUTION;

MICROSCOPIC EXAMINATION; TEMPERATURE MEASUREMENT;

EID: 0005031245     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2824245     Document Type: Article

References (25)

1. Abramowitz, M., and Stegun, I. A., 1972, Handbook of Mathematical Functions, Dover, New Yorjt, pp. 378-379.
2. Binnig, G., Rohrer, H., Gerber, C., and Weibel, E., 1982, “Surface Studies by Scanning Tunneling Microscopy,” Physical Review Letters, Vol. 49, pp. 57-61.
3. Binnig, G., Quate, C. F., and Gerber, Ch., 1986, “Atomic Force Microscope,” Physical Review Letters, Vol. 56, pp. 930-933.
4. Carslaw, H. S., and Jaeger, J. C., 1959, Conduction of Heat in Solids, Clarendon Press, Oxford, p. 263.
5. Fish, G., Bouevitch, O., Kokotoy, S., and Lieberman, K., 1995, “Ultrafast Response Micropipette Based Thermocouple Sensors,” Review of Scientific Instruments, Vol. 66, pp. 3300-3306.
6. Goodson, K. E., and Asheghi, M., 1997, “Near-Field Optical Thermometry,” Microscale Thermophysical Engineering, in press.
7. Lai, J., Perazzo, T., Shi, Z., and Majumdar, A., 1997, “Optimization and Performance of High-Resolution Micro-optomechanical Thermal Sensors,” Sensors and Actuators, Vol. 58, pp. 113-119.
8. Luo, K., Shi, Z., Lai, J., and Majumdar, A., 1996, “Nanofabrication of Sensors on Cantilever Probe Tips for Scanning Multiprobe Microscopy,” Applied Physics Letters, Vol. 68, pp. 325-327.
9. Luo, K., Shi, Z., Varesi, J., and Majumdar, A., 1997a, “Sensor Nanofabrication, Performance, and Conduction Mechanisms in Scanning Thermal Microscopy,” Journal of Vacuum Science and Technology B, Vol. 15, pp. 349-360.
10. Luo, K., Lederman, M., and Majumdar, A., 1997b, “Liquid-Film Mediated Scanning Thermal Microscopy of a Magnetoresistive Head,” Microscale Thermophysical Engineering, in press.
11. Majumdar, A., Carrejo, J. P., and Lai, J., 1993, “Thermal Imaging Using the Atomic Force Microscope,” Applied Physics Letters, Vol. 62, pp. 2501-2503.
12. Majumdar, A., Lai, J., Chandrachood, M., Nakabeppu, O., Wu, Y., and Shi, Z., 1995, “Thermal Imaging by Atomic Force Microscopy Using Thermocouple Cantilever Probes,” Review of Scientific Instruments, Vol. 66, pp. 3584-3592.
13. Martin, Y., and Wickramasinghe, H. K., 1987, “Study of Dynamic Current Distribution in Logic Circuits by Joule Displacement Microscopy,” Applied Physics Letters, Vol. 50, pp. 167-168.
14. Madou, M., 1997, Fundamentals of Microfabrication, CRC Press, Boca Raton, p. 3.
15. Nonnenmacher, M., and Wickramasinghe, H. K., 1992, “Scanning Probe Microscopy of Thermal Conductivity and Sub-surface Properties,” Applied Physics Letters, Vol. 61, pp. 168-170.
16. Pylkki, R. J., Moyer, P. J., and West, P. E., 1994, “Scanning Near-Field Optical and Scanning Thermal Microscopy,” Japanese J. Appl. Phys.: Part 1, Vol. 33, pp. 3785-3790.
17. Radmacher, M., Cleveland, J. P., and Hansma, P. K., 1995, “Improvement of Thermally Induced Bending of Cantilevers Used for Atomic Force Microscopy,” Scanning, Vol. 17, pp. 117-121.
18. Sarid, D., 1994, Scanning Force Microscopy: With Applications to Electric, Magnetic, and Atomic Forces, Oxford Univ. Press, New York.
19. Varesi, J., and Majumdar, A., 1998, “Scanning Joule Expansion Microscopy at Nanometer Scales,” Applied Physics Letters, Vol. 72, pp. 37-39.
20. Varesi, J., Muenster, S., and Majumdar, A., 1998, “High-Resolution Current and Temperature Mapping of Electronic Devices Using Scanning Joule Expansion Microscopy,” presented at the IEEE International Reliability Physics Symposium, Reno, Mar. 30-Apr. 2.
21. Weaver, J. M. R., Walpita, L. M., and Wickramasinghe, H. K.,1989, “Optical Absorption Microscopy and Spectroscopy With Nanometer Resolution,” Nature, Vol. 342, pp. 783-785.
22. Williams, C. C., and Wickramasinghe, H. K., 1986a, “Scanning Thermal Profiler,” Applied Physics Letters, Vol. 49, pp. 1587-1589.
23. Williams, C. C., and Wickramasinghe, H. K., 1986b, “High Resolution Thermal Microscopy,” Ultrasonics Symposium Proc., B. R. McAvoy, ed., IEEE, New York, pp. 393-397.
24. Williams, C.C., and Wickramasinghe, H. K., 1988a, “Photothermal Imaging With Sub-100 nm Spatial Resolution,” in: Optical Sciences, A. L. Schawlow, ed., Springer Series, pp. 364-369.
25. Williams, C. C., and Wickramasinghe, H. K., 1988b, “Thermal and Photothermal Imaging on a Sub-100 Nanometer Scale,” Proc. SPIE, Vol. 897, pp. 129-134.