Ultrathin high-quality tantalum pentoxide films grown by photoinduced chemical vapor deposition

Applied Physics Letters

Volumn 77, Issue 22, 2000, Pages 3574-3576

  Zhang, Jun Ying ^a   Boyd, Ian W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001760397     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1328051     Document Type: Article

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