Measurement of SiH2 density in a discharge by intracavity laser absorption spectroscopy and CW cavity ring-down spectroscopy

Journal of Physics D: Applied Physics

Volumn 31, Issue 10, 1998, Pages 1168-1175

  Campargue, Alain ^a   Romanini, Daniele ^a   Sadeghi, Nader ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ELECTRON TRANSITIONS; ELECTRONIC DENSITY OF STATES; ELECTRONIC STRUCTURE; MOLECULAR VIBRATIONS; SILANES;

CW CAVITY RING DOWN SPECTROSCOPY; INTRACAVITY LASER ABSORPTION SPECTROSCOPY;

PLASMA DENSITY;

EID: 0032073166     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/10/007     Document Type: Article

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