Mapping the three-dimensional strain field around a microindentation on silicon using polishing and Raman spectroscopy

Journal of Applied Physics

Volumn 88, Issue 8, 2000, Pages 4582-4585

  Puech, Pascal ^a   Pinel, Stéphane ^b   Jasinevicius, Renato G ^c   Pizani, Paolo Sergio ^d  

^a UNIVERSITÉ DE TOULOUSE   (France)

^b LAAS CNRS   (France)

^c UNIVERSITY OF SÃO PAULO   (Brazil)

^d FEDERAL UNIVERSITY OF SÃO CARLOS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001444557     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1289817     Document Type: Article

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