Stress and structural images of microindented silicon by Raman microscopy

Applied Spectroscopy

Volumn 51, Issue 9, 1997, Pages 1405-1409

  Bowden, Michael ^a   Gardiner, Derek J ^a  

^a NORTHUMBRIA UNIVERSITY   (United Kingdom)

Author keywords

Image; Microindent; Raman; Silicon; Stress

Indexed keywords

CRYSTALS; IMAGING TECHNIQUES; MICROSCOPES; SILICON; STRESSES;

MICROINDENT;

RAMAN SCATTERING;

EID: 0031223039     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702971942123     Document Type: Article

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