Micro-Raman analysis of residual stresses and phase transformations in crystalline silicon under microindentation

Journal of Materials Research

Volumn 12, Issue 9, 1997, Pages 2262-2273

  Lucazeau, G ^a   Abello, L ^a  

^a Grenoble INP Phelma   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; HEAT TREATMENT; LASER BEAM EFFECTS; PHASE TRANSITIONS; PHONONS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES;

VICKERS MICROINDENTATIONS;

SEMICONDUCTING SILICON;

EID: 0031234188     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0302     Document Type: Article

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