Increasing the dynamic range of a micromechanical moving-plate capacitor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 78-89

  Kyynarainen, J M ^a   Oja, A S ^a   Seppa, H ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; MICROACTUATORS; RESONANT CIRCUITS;

ELECTROSTATIC ACTUATION; MICROMECHANICAL CAPACITOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0033703690     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)