SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 82, Issue 5, 1997, Pages 2184-2199

Structural inhomogeneity and silicon enrichment of buried SiO2 layers formed by oxygen ion implantation in silicon

(4) Afanas'ev, V V a Stesmans, A a Revesz, A G b Hughes, H L c

a UNIVERSITY OF LEUVEN (Belgium)

b Revesz Associates (United States)

c NAVAL RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001175808 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.366025 Document Type: Article

Times cited : (26)

References (95)

1
- 0003783816
- Kluwer, Boston
- J.-P. Colinge, Silicon-on-Insulator Technology: Materials to VLSI (Kluwer, Boston, 1991).
- (1991) Silicon-on-Insulator Technology: Materials to VLSI
- Colinge, J.-P.¹

2
- 0004047079
- Kluwer, Boston
- S. Cristoloveanu and S. S. Li, Electrical Characterization of Silicon-on-Insulator Materials and Devices (Kluwer, Boston, 1995).
- (1995) Electrical Characterization of Silicon-on-Insulator Materials and Devices
- Cristoloveanu, S.¹ Li, S.S.²

3
- 0013259246
- edited by J.-P. Colinge et al. Kluwer, Dordrecht
- A. G. Revesz and H. L. Hughes, Physical and Technical Problems of SOI Structures and Devices, edited by J.-P. Colinge et al. (Kluwer, Dordrecht, 1995), p. 133.
- (1995) Physical and Technical Problems of SOI Structures and Devices , pp. 133
- Revesz, A.G.¹ Hughes, H.L.²

4
- 0025660888
- A. Stesmans, R. A. B. Devine, A. G. Revesz, and H. L. Hughes, IEEE Trans. Nucl. Sci. 37, 2008 (1990).
- (1990) IEEE Trans. Nucl. Sci. , vol.37 , pp. 2008
- Stesmans, A.¹ Devine, R.A.B.² Revesz, A.G.³ Hughes, H.L.⁴

5
- 36449000502
- A. Stesmans, A. G. Revesz, and H. L. Hughes, J. Appl. Phys. 69, 175 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 175
- Stesmans, A.¹ Revesz, A.G.² Hughes, H.L.³

6
- 0026404891
- M. E. Zvanut, R. E. Stahlbush, W. E. Carlos, R. K. Lawrence, R. Hevey, and G. A. Brown, IEEE Trans. Nucl. Sci. 38, 1253 (1991).
- (1991) IEEE Trans. Nucl. Sci. , vol.38 , pp. 1253
- Zvanut, M.E.¹ Stahlbush, R.E.² Carlos, W.E.³ Lawrence, R.K.⁴ Hevey, R.⁵ Brown, G.A.⁶

7
- 0000154236
- D. Herve, J.-L. Leray, and R. A. B. Devine, J. Appl. Phys. 72, 3634 (1992).
- (1992) J. Appl. Phys. , vol.72 , pp. 3634
- Herve, D.¹ Leray, J.-L.² Devine, R.A.B.³

8
- 84975370227
- G. A. Brown and A. G. Revesz, J. Electrochem. Soc. 139, 309C (1992).
- (1992) J. Electrochem. Soc. , vol.139
- Brown, G.A.¹ Revesz, A.G.²

9
- 0027700929
- A. G. Revesz, G. A. Brown, and H. L. Hughes, J. Electrochem. Soc. 140, 3222 (1993).
- (1993) J. Electrochem. Soc. , vol.140 , pp. 3222
- Revesz, A.G.¹ Brown, G.A.² Hughes, H.L.³

10
- 0027657071
- G. A. Brown and A. G. Revesz, IEEE Trans. Electron Devices 40, 1700 (1993).
- (1993) IEEE Trans. Electron Devices , vol.40 , pp. 1700
- Brown, G.A.¹ Revesz, A.G.²

11
- 0004903505
- IEEE, Piscataway, NJ
- T. Nakajima, T. Yano, I. Hamaguchi, M. Tachimori, and T. Fujita, Proceedings of the 1994 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1994), p. 81.
- (1994) Proceedings of the 1994 IEEE International SOI Conference , pp. 81
- Nakajima, T.¹ Yano, T.² Hamaguchi, I.³ Tachimori, M.⁴ Fujita, T.⁵

12
- 0027553329
- S. Nakashima and K. Izumi, J. Mater. Res. 8, 523 (1993).
- (1993) J. Mater. Res. , vol.8 , pp. 523
- Nakashima, S.¹ Izumi, K.²

13
- 3743151245
- L. Meda, S. Bertoni, G. F. Cerofolini, and H. Gassel, Nucl. Instrum. Methods Phys. Res. B 84, 270 (1994).
- (1994) Nucl. Instrum. Methods Phys. Res. B , vol.84 , pp. 270
- Meda, L.¹ Bertoni, S.² Cerofolini, G.F.³ Gassel, H.⁴

14
- 0029754617
- V. V. Afanas'ev, G. A. Brown, H. L. Hughes, S. T. Liu, and A. G. Revesz, J. Electrochem. Soc. 143, 347 (1996).
- (1996) J. Electrochem. Soc. , vol.143 , pp. 347
- Afanas'ev, V.V.¹ Brown, G.A.² Hughes, H.L.³ Liu, S.T.⁴ Revesz, A.G.⁵

15
- 0042579140
- IEEE, Piscataway, NJ
- M. J. Anc and W. A. Krull, Proceedings of the 1994 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1994), p. 79.
- (1994) Proceedings of the 1994 IEEE International SOI Conference , pp. 79
- Anc, M.J.¹ Krull, W.A.²

16
- 0029326869
- M. J. Anc and W. A. Krull, Microelectron. Eng. 28, 407 (1995).
- (1995) Microelectron. Eng. , vol.28 , pp. 407
- Anc, M.J.¹ Krull, W.A.²

17
- 0029492528
- IEEE, Piscataway, NJ
- M. J. Anc and W. A. Krull, Proceedings of the 1995 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1995), p. 72.
- (1995) Proceedings of the 1995 IEEE International SOI Conference , pp. 72
- Anc, M.J.¹ Krull, W.A.²

18
- 0005267875
- B. J. Mrstik, P. J. McMarr, H. L. Hughes, M. J. Anc, and W. A. Krull, Appl. Phys. Lett. 67, 3283 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3283
- Mrstik, B.J.¹ McMarr, P.J.² Hughes, H.L.³ Anc, M.J.⁴ Krull, W.A.⁵

19
- 0029490334
- IEEE, Piscataway, NJ
- K. Kawamura, T. Nakajima, I. Hamaguchi, T. Yano, Y. Nagatake, and M. Tachimori, Proceedings of the 1995 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1995), p. 156.
- (1995) Proceedings of the 1995 IEEE International SOI Conference , pp. 156
- Kawamura, K.¹ Nakajima, T.² Hamaguchi, I.³ Yano, T.⁴ Nagatake, Y.⁵ Tachimori, M.⁶

20
- 0027848103
- A. G. Revesz, G. A. Brown, and H. L. Hughes, Mater. Res. Soc. Symp. Proc. 244, 555 (1993).
- (1993) Mater. Res. Soc. Symp. Proc. , vol.244 , pp. 555
- Revesz, A.G.¹ Brown, G.A.² Hughes, H.L.³

21
- 36449002718
- P. Friedrichs, E. P. Burte, and R. Schorner, Appl. Phys. Lett. 65, 1665 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1665
- Friedrichs, P.¹ Burte, E.P.² Schorner, R.³

22
- 0000004718
- J. N. Shenoy, M. K. Das, J. A. Cooper, M. R. Melloch, and J. W. Palmour, J. Appl. Phys. 79, 3042 (1996).
- (1996) J. Appl. Phys. , vol.79 , pp. 3042
- Shenoy, J.N.¹ Das, M.K.² Cooper, J.A.³ Melloch, M.R.⁴ Palmour, J.W.⁵

23
- 0000102171
- V. V. Afanas'ev, A. Stesmans, M. Bassler, G. Pensl, M. J. Schulz, and C. I. Harris, Appl. Phys. Lett. 68, 2141 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2141
- Afanas'ev, V.V.¹ Stesmans, A.² Bassler, M.³ Pensl, G.⁴ Schulz, M.J.⁵ Harris, C.I.⁶

24
- 0004844835
- IEEE, Piscataway, NJ
- D. K. Sadana, J. Lasky, H. J. Hovel, K. Petrillo, and P. Roitman, Proceedings of the 1994 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1994), p. 111.
- (1994) Proceedings of the 1994 IEEE International SOI Conference , pp. 111
- Sadana, D.K.¹ Lasky, J.² Hovel, H.J.³ Petrillo, K.⁴ Roitman, P.⁵

25
- 3743125748
- K. Vanheusden and A. Stesmans, Appl. Phys. Lett. 57, 2250 (1990).
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2250
- Vanheusden, K.¹ Stesmans, A.²

26
- 0001247853
- K. Vanheusden and A. Stesmans, J. Appl. Phys. 69, 6656 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 6656
- Vanheusden, K.¹ Stesmans, A.²

27
- 0028713286
- B. J. Mrstik, P. J. McMarr, R. K. Lawrence, and H. L. Hughes, IEEE Trans. Nucl. Sci. 41, 2277 (1994).
- (1994) IEEE Trans. Nucl. Sci. , vol.41 , pp. 2277
- Mrstik, B.J.¹ McMarr, P.J.² Lawrence, R.K.³ Hughes, H.L.⁴

28
- 0029492817
- IEEE, Piscataway, NJ
- J.-H. Yap and J. E. Chung, Proceedings of the 1995 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1995), p. 150.
- (1995) Proceedings of the 1995 IEEE International SOI Conference , pp. 150
- Yap, J.-H.¹ Chung, J.E.²

29
- 3743099004
- IEEE, Piscataway, NJ
- J. U. Yoon, J. Nec, J.-H. Yap, and J. E. Chung, Proceedings of the 1995 IEEE International SOI Conference (IEEE, Piscataway, NJ 1995), p. 146.
- (1995) Proceedings of the 1995 IEEE International SOI Conference , pp. 146
- Yoon, J.U.¹ Nec, J.² Yap, J.-H.³ Chung, J.E.⁴

30
- 0000626353
- V. Afanas'ev, A. G. Revesz, G. A. Brown, and H. L. Hughes, J. Electrochem. Soc. 141, 2801 (1994).
- (1994) J. Electrochem. Soc. , vol.141 , pp. 2801
- Afanas'ev, V.¹ Revesz, A.G.² Brown, G.A.³ Hughes, H.L.⁴

31
- 0027642633
- S. I. Fedoseenko, V. K. Adamchuk, and V. V. Afanas'ev, Microelectron. Eng. 22, 367 (1993).
- (1993) Microelectron. Eng. , vol.22 , pp. 367
- Fedoseenko, S.I.¹ Adamchuk, V.K.² Afanas'ev, V.V.³

32
- 0030083705
- V. V. Afanas'ev, A. G. Revesz, and H. L. Hughes, J. Electrochem. Soc. 143, 695 (1996).
- (1996) J. Electrochem. Soc. , vol.143 , pp. 695
- Afanas'ev, V.V.¹ Revesz, A.G.² Hughes, H.L.³

33
- 3743105603
- Silicon-on-Insulator Technology and Devices, edited by S. Cristoloveanu
- S. I. Fedoseenko, V. V. Afanas'ev, and A. G. Revesz, in Silicon-on-Insulator Technology and Devices, edited by S. Cristoloveanu [Electrochem. Soc. Proc. 94-11, 253 (1994)].
- (1994) Electrochem. Soc. Proc. , vol.94 , Issue.11 , pp. 253
- Fedoseenko, S.I.¹ Afanas'ev, V.V.² Revesz, A.G.³

34
- 0029543751
- IEEE, Piscataway, NJ
- V. V. Afanas'ev, A. G. Revesz, W. E. Jenkins, and H. L. Hughes, Proceedings of the 1995 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1995), p. 102.
- (1995) Proceedings of the 1995 IEEE International SOI Conference , pp. 102
- Afanas'ev, V.V.¹ Revesz, A.G.² Jenkins, W.E.³ Hughes, H.L.⁴

35
- 0027642342
- S. P. Wainwright, C. Ngwa, S. Hall, and W. Eccleston, Microelectron. Eng. 22, 399 (1993).
- (1993) Microelectron. Eng. , vol.22 , pp. 399
- Wainwright, S.P.¹ Ngwa, C.² Hall, S.³ Eccleston, W.⁴

36
- 36449009199
- R. J. Lambert, T. N. Bhar, and H. L. Hughes, Appl. Phys. Lett. 64, 3291 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 3291
- Lambert, R.J.¹ Bhar, T.N.² Hughes, H.L.³

37
- 0030182464
- R. K. Lawrence and D. E. Ioannou, IEEE Electron Device Lett. 17, 341 (1996).
- (1996) IEEE Electron Device Lett. , vol.17 , pp. 341
- Lawrence, R.K.¹ Ioannou, D.E.²

38
- 0028728696
- V. V. Afanas'ev and V. K. Adamchuk, Prog. Surf. Sci. 47, 301 (1994).
- (1994) Prog. Surf. Sci. , vol.47 , pp. 301
- Afanas'ev, V.V.¹ Adamchuk, V.K.²

39
- 0025597502
- H. E. Boesch, T. L. Taylor, I. R. Hite, and W. E. Bailey, IEEE Trans. Nucl. Sci. 37, 1982 (1990).
- (1990) IEEE Trans. Nucl. Sci. , vol.37 , pp. 1982
- Boesch, H.E.¹ Taylor, T.L.² Hite, I.R.³ Bailey, W.E.⁴

40
- 0001598069
- R. E. Stahlbush, G. J. Campisi, J. B. McKitterick, W. Mazara, P. Roitman, and G. A. Brown, IEEE Trans. Nucl. Sci. 39, 2086 (1992).
- (1992) IEEE Trans. Nucl. Sci. , vol.39 , pp. 2086
- Stahlbush, R.E.¹ Campisi, G.J.² McKitterick, J.B.³ Mazara, W.⁴ Roitman, P.⁵ Brown, G.A.⁶

41
- 0027851453
- R. E. Stahlbush, H. L. Hughes, and W. A. Krull, IEEE Trans. Nucl. Sci. 40, 1740 (1993).
- (1993) IEEE Trans. Nucl. Sci. , vol.40 , pp. 1740
- Stahlbush, R.E.¹ Hughes, H.L.² Krull, W.A.³

42
- 0027867153
- H. E. Boesch, T. L. Taylor, and W. A. Krull, IEEE Trans. Nucl. Sci. 40, 1748 (1993).
- (1993) IEEE Trans. Nucl. Sci. , vol.40 , pp. 1748
- Boesch, H.E.¹ Taylor, T.L.² Krull, W.A.³

43
- 0027841198
- C. A. Pennise, H. E. Boesch, G. Goetz, and J. B. McKitterick, IEEE Trans. Nucl. Sci. 40, 1765 (1993).
- (1993) IEEE Trans. Nucl. Sci. , vol.40 , pp. 1765
- Pennise, C.A.¹ Boesch, H.E.² Goetz, G.³ McKitterick, J.B.⁴

44
- 36449006253
- V. V. Afanas'ev, P. Ericsson, S. Bengtsson, and M. O. Andersson, Appl. Phys. Lett. 66, 1653 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1653
- Afanas'ev, V.V.¹ Ericsson, P.² Bengtsson, S.³ Andersson, M.O.⁴

45
- 0001257610
- J. F. Conley, P. M. Lenahan, and P. Roitman, Appl. Phys. Lett. 60, 2889 (1992).
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2889
- Conley, J.F.¹ Lenahan, P.M.² Roitman, P.³

46
- 21544444928
- J. F. Conley and P. M. Lenahan, Appl. Phys. Lett. 62, 40 (1993).
- (1993) Appl. Phys. Lett. , vol.62 , pp. 40
- Conley, J.F.¹ Lenahan, P.M.²

47
- 0027851925
- W. L. Warren, M. R. Shaneyfelt, J. R. Schwank, D. M. Fleetwood, P. S. Winokur, R. A. B. Devine, W. P. Mazara, and J. B. McKitterick, IEEE Trans. Nucl. Sci. 40, 1755 (1993).
- (1993) IEEE Trans. Nucl. Sci. , vol.40 , pp. 1755
- Warren, W.L.¹ Shaneyfelt, M.R.² Schwank, J.R.³ Fleetwood, D.M.⁴ Winokur, P.S.⁵ Devine, R.A.B.⁶ Mazara, W.P.⁷ McKitterick, J.B.⁸

48
- 36449003994
- K. Vanheusden and A. Stesmans, Appl. Phys. Lett. 62, 2405 (1993).
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2405
- Vanheusden, K.¹ Stesmans, A.²

49
- 0005809270
- A. Stesmans and K. Vanheusden, J. Appl. Phys. 76, 1681 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 1681
- Stesmans, A.¹ Vanheusden, K.²

50
- 33744807323
- R. A. B. Devine, W. L. Warren, J. B. Xu, I. H. Wilson, P. Paillet, and J. -L. Leray, J. Appl. Phys. 77, 175 (1995).
- (1995) J. Appl. Phys. , vol.77 , pp. 175
- Devine, R.A.B.¹ Warren, W.L.² Xu, J.B.³ Wilson, I.H.⁴ Paillet, P.⁵ Leray, J.L.⁶

51
- 0001266208
- A. Stesmans and V. V. Afanas'ev, Appl. Phys. Lett. 69, 2056 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2056
- Stesmans, A.¹ Afanas'ev, V.V.²

52
- 21544478697
- R. A. B. Devine, D. Mathiot, W. L. Warren, D. M. Fleetwood, and B. Aspar, Appl. Phys. Lett. 63, 2926 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2926
- Devine, R.A.B.¹ Mathiot, D.² Warren, W.L.³ Fleetwood, D.M.⁴ Aspar, B.⁵

53
- 0001244874
- R. A. B. Devine, D. Mathiot, W. L. Warren, and B. Aspar, J. Appl. Phys. 79, 2302 (1996).
- (1996) J. Appl. Phys. , vol.79 , pp. 2302
- Devine, R.A.B.¹ Mathiot, D.² Warren, W.L.³ Aspar, B.⁴

54
- 0027641978
- K. Vanheusden and A. Stesmans, Microelectron. Eng. 22, 371 (1993).
- (1993) Microelectron. Eng. , vol.22 , pp. 371
- Vanheusden, K.¹ Stesmans, A.²

55
- 21544469933
- K. Vanheusden and A. Stesmans, Appl. Phys. Lett. 64, 2575 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2575
- Vanheusden, K.¹ Stesmans, A.²

56
- 0026142652
- A. Stesmans, Solid State Commun. 78, 321 (1991).
- (1991) Solid State Commun. , vol.78 , pp. 321
- Stesmans, A.¹

57
- 0342967085
- K. Vanheusden and A. Stesmans, J. Appl. Phys. 73, 876 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 876
- Vanheusden, K.¹ Stesmans, A.²

58
- 3743125746
- K. Vanheusden and A. Stesmans, Appl. Phys. Lett. 62, 273 (1993).
- (1993) Appl. Phys. Lett. , vol.62 , pp. 273
- Vanheusden, K.¹ Stesmans, A.²

59
- 85013739249
- K. Vanheusden, A. Stesmans, and V. V. Afanas'ev, J. Non-Cryst. Solids 187, 253 (1995).
- (1995) J. Non-Cryst. Solids , vol.187 , pp. 253
- Vanheusden, K.¹ Stesmans, A.² Afanas'ev, V.V.³

60
- 3743099003
- K. Vanheusden, A. Stesmans, and V. V. Afanas'ev, J. Appl. Phys. 77, 2419 (1995).
- (1995) J. Appl. Phys. , vol.77 , pp. 2419
- Vanheusden, K.¹ Stesmans, A.² Afanas'ev, V.V.³

61
- 0029326241
- S. I. Fedoseenko, Microelectron. Eng. 28, 419 (1995).
- (1995) Microelectron. Eng. , vol.28 , pp. 419
- Fedoseenko, S.I.¹

62
- 0039438908
- K. Vanheusden, W. L. Warren, J. R. Schwank, D. M. Fleetwood, M. R. Shaneyfelt, P. S. Winokur, and R. A. B. Devine, Appl. Phys. Lett. 68, 2117 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2117
- Vanheusden, K.¹ Warren, W.L.² Schwank, J.R.³ Fleetwood, D.M.⁴ Shaneyfelt, M.R.⁵ Winokur, P.S.⁶ Devine, R.A.B.⁷

63
- 0000775116
- W. L. Warren, K. Vanheusden, J. R. Schwank, D. M. Fleetwood, P. S. Winokur, and R. A. B. Devine, Appl. Phys. Lett. 68, 2993 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2993
- Warren, W.L.¹ Vanheusden, K.² Schwank, J.R.³ Fleetwood, D.M.⁴ Winokur, P.S.⁵ Devine, R.A.B.⁶

64
- 36449003730
- J. M. M. de Nijs, K. G. Druijf, V. V. Afanas'ev, E. van der Drift, and P. Balk, Appl. Phys. Lett. 65, 2428 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2428
- De Nijs, J.M.M.¹ Druijf, K.G.² Afanas'ev, V.V.³ Van Der Drift, E.⁴ Balk, P.⁵

65
- 0001618693
- R. Helms and E. Poindexter, Rep. Prog. Phys. 57, 791 (1994).
- (1994) Rep. Prog. Phys. , vol.57 , pp. 791
- Helms, R.¹ Poindexter, E.²

66
- 84990928326
- E. H. Poindexter, J. Non-Cryst. Solids 187, 257 (1995).
- (1995) J. Non-Cryst. Solids , vol.187 , pp. 257
- Poindexter, E.H.¹

67
- 0025489024
- S. Nakashima and K. Izumi, J. Mater. Res. 5, 1918 (1990).
- (1990) J. Mater. Res. , vol.5 , pp. 1918
- Nakashima, S.¹ Izumi, K.²

68
- 36449006261
- Y. Takahashi, T. Ishiyama, and M. Tabe, Appl. Phys. Lett. 65, 2987 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2987
- Takahashi, Y.¹ Ishiyama, T.² Tabe, M.³

69
- 0042078077
- H. H. Hosack, J. Hollingsworth, M. K. El-Ghor, and K. A. Joyner, Mater. Res. Soc. Symp. Proc. 235, 159 (1992).
- (1992) Mater. Res. Soc. Symp. Proc. , vol.235 , pp. 159
- Hosack, H.H.¹ Hollingsworth, J.² El-Ghor, M.K.³ Joyner, K.A.⁴

70
- 0017957990
- R. J. Powell and M. Morad, J. Appl. Phys. 49, 2499 (1978).
- (1978) J. Appl. Phys. , vol.49 , pp. 2499
- Powell, R.J.¹ Morad, M.²

71
- 21544457445
- K. Vanheusden and A. Stesmans, J. Appl. Phys. 74, 275 (1993).
- (1993) J. Appl. Phys. , vol.74 , pp. 275
- Vanheusden, K.¹ Stesmans, A.²

72
- 3743099001
- K. Vanheusden and A. Stesmans, Appl. Phys. Lett. 67, 1399 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1399
- Vanheusden, K.¹ Stesmans, A.²

73
- 0342852283
- J. Stoemenos, J. Margail, C. Jaussaud, M. Dupuy, and M. Burel, Appl. Phys. Lett. 48, 1470 (1986).
- (1986) Appl. Phys. Lett. , vol.48 , pp. 1470
- Stoemenos, J.¹ Margail, J.² Jaussaud, C.³ Dupuy, M.⁴ Burel, M.⁵

74
- 0040715391
- J. Margail, J. Stoemenos, C. Jaussaud, and M. Burel, Appl. Phys. Lett. 54, 526 (1989).
- (1989) Appl. Phys. Lett. , vol.54 , pp. 526
- Margail, J.¹ Stoemenos, J.² Jaussaud, C.³ Burel, M.⁴

75
- 0027642133
- J. Stoemenos, Microelectron. Eng. 22, 307 (1993).
- (1993) Microelectron. Eng. , vol.22 , pp. 307
- Stoemenos, J.¹

76
- 0029491027
- IEEE, Piscataway, NJ
- S. Bagchi, J. D. Lee, S. J. Krause, and P. Roitman, Proceedings of the 1995 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1995), p. 118.
- (1995) Proceedings of the 1995 IEEE International SOI Conference , pp. 118
- Bagchi, S.¹ Lee, J.D.² Krause, S.J.³ Roitman, P.⁴

77
- 85033181512
- private communication
- M. E. Twigg (private communication).
- Twigg, M.E.¹

78
- 0001093831
- J. A. Lely, Ber. Dtsch. Keram. Ges. 32, 229 (1955).
- (1955) Ber. Dtsch. Keram. Ges. , vol.32 , pp. 229
- Lely, J.A.¹

79
- 6144238390
- V. V. Afanas'ev, A. Stesmans, and M. E. Twigg, Phys. Rev. Lett. 77, 4206 (1996).
- (1996) Phys. Rev. Lett. , vol.77 , pp. 4206
- Afanas'ev, V.V.¹ Stesmans, A.² Twigg, M.E.³

80
- 3743061676
- IEEE, Piscataway, NJ
- T. Katayama, S. Nakashima, Y. Miyamura, M. Kataoka, M. Danbata, M. Imai, K. Izumi, and N. Ohwada, Proceedings of the 1994 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1994), p. 75.
- (1994) Proceedings of the 1994 IEEE International SOI Conference , pp. 75
- Katayama, T.¹ Nakashima, S.² Miyamura, Y.³ Kataoka, M.⁴ Danbata, M.⁵ Imai, M.⁶ Izumi, K.⁷ Ohwada, N.⁸

81
- 0037496574
- IEEE, Piscataway, NJ
- S. Nakashima, T. Katayama, Y. Miyamura, A. Matsuzaki, M. Imai, K. Izumi, and N. Ohwada, Proceedings of the 1994 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1994), p. 71.
- (1994) Proceedings of the 1994 IEEE International SOI Conference , pp. 71
- Nakashima, S.¹ Katayama, T.² Miyamura, Y.³ Matsuzaki, A.⁴ Imai, M.⁵ Izumi, K.⁶ Ohwada, N.⁷

82
- 3743099000
- D. J. Di Maria, F. J. Feigl, and S. R. Butler, Phys. Rev. B 11, 5023 (1975).
- (1975) Phys. Rev. B , vol.11 , pp. 5023
- Di Maria, D.J.¹ Feigl, F.J.² Butler, S.R.³

83
- 0030401391
- IEEE, Piscataway, NJ
- V. V. Afanas'ev, B. Aspar, A. Auberton-Herve, G. A. Brown, W. Jenkins, H. L. Hughes, and A. G. Revesz, Proceedings of the 1996 IEEE International SOI Conference (IEEE, Piscataway, NJ, 1996), p. 56.
- (1996) Proceedings of the 1996 IEEE International SOI Conference , pp. 56
- Afanas'ev, V.V.¹ Aspar, B.² Auberton-Herve, A.³ Brown, G.A.⁴ Jenkins, W.⁵ Hughes, H.L.⁶ Revesz, A.G.⁷

84
- 0017005210
- T. Y. Tan and W. K. Tice, Philos. Mag. 34, 615 (1976).
- (1976) Philos. Mag. , vol.34 , pp. 615
- Tan, T.Y.¹ Tice, W.K.²

85
- 0016992770
- D. M. Maher, A. Staudinger, and J. R. Patel, J. Appl. Phys. 47, 3813 (1976).
- (1976) J. Appl. Phys. , vol.47 , pp. 3813
- Maher, D.M.¹ Staudinger, A.² Patel, J.R.³

86
- 0029326455
- M. Itsumi, M. Tomita, and M. Yamawaki, Microelectron. Eng. 28, 39 (1995).
- (1995) Microelectron. Eng. , vol.28 , pp. 39
- Itsumi, M.¹ Tomita, M.² Yamawaki, M.³

87
- 0018031304
- K. H. Yang, H. F. Kappert, and G. H. Schwuttke, Phys. Status Solidi A 50, 221 (1978).
- (1978) Phys. Status Solidi A , vol.50 , pp. 221
- Yang, K.H.¹ Kappert, H.F.² Schwuttke, G.H.³

88
- 0021371075
- A. Bourret, J. Thibault-Desseaux, and D. N. Siedman, J. Appl. Phys. 55, 825 (1984).
- (1984) J. Appl. Phys. , vol.55 , pp. 825
- Bourret, A.¹ Thibault-Desseaux, J.² Siedman, D.N.³

89
- 0001464295
- S. T. Pantelides and W. A. Harrison, Phys. Rev. B 13, 2667 (1976).
- (1976) Phys. Rev. B , vol.13 , pp. 2667
- Pantelides, S.T.¹ Harrison, W.A.²

90
- 0001227290
- K. Wada, H. Nakanishi, H. Takaoka, and N. Inoue, J. Cryst. Growth 57, 535 (1982).
- (1982) J. Cryst. Growth , vol.57 , pp. 535
- Wada, K.¹ Nakanishi, H.² Takaoka, H.³ Inoue, N.⁴

91
- 0029482204
- M. Miyazaki, S. Miyazaki, Y. Yanase, T. Ochiai, and T. Shigematsu, Jpn. J. Appl. Phys., 134, 6303 (1995).
- (1995) Jpn. J. Appl. Phys. , vol.134 , pp. 6303
- Miyazaki, M.¹ Miyazaki, S.² Yanase, Y.³ Ochiai, T.⁴ Shigematsu, T.⁵

92
- 0004033098
- Interscience, New York
- R. W. G. Wyckhoff, Crystal Structures, 4th ed. (Interscience, New York, 1974).
- (1974) Crystal Structures, 4th Ed.
- Wyckhoff, R.W.G.¹

93
- 0003877758
- Chemical Rubber, Cleveland
- CRC Handbook of Chemistry and Physics, 52nd ed. (Chemical Rubber, Cleveland, 1972), p. B-211.
- (1972) CRC Handbook of Chemistry and Physics, 52nd Ed.

94
- 0001196859
- O. W. Holland, D. Fathy, and D. K. Sadana, Appl. Phys. Lett. 69, 674 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 674
- Holland, O.W.¹ Fathy, D.² Sadana, D.K.³

95
- 36448999793
- U. Gösele, E. Schroer, and J.-Y. Huh, Appl. Phys. Lett. 67, 241 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 241
- Gösele, U.¹ Schroer, E.² Huh, J.-Y.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.