Influence of 6H-SiC(0001) substrate surface morphology on the growth of AIN epitaxial layers

Applied Physics Letters

Volumn 74, Issue 7, 1999, Pages 985-987

  Torres, V M ^a,b   Edwards, J L ^a   Wilkens, B J ^a   Smith, David J ^a   Doak, R B ^a   Tsong, I S T ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

^b North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001026034     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123431     Document Type: Article

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