Low temperature oxidation of SiGe in ozone: Ultrathin oxides

Journal of Applied Physics

Volumn 87, Issue 4, 2000, Pages 2046-2051

  Madsen, Jon M ^a   Cui, Zhenjiang ^a   Takoudis, Christos G ^a  

^a 1120 Science and Engineering Offices   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000869663     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372134     Document Type: Article

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