High-resolution scanning capacitance microscopy of silicon devices by surface beveling

Applied Physics Letters

Volumn 76, Issue 18, 2000, Pages 2565-2567

  Giannazzo, Filippo ^a   Priolo, Francesco ^a   Raineri, Vito ^b   Privitera, Vittorio ^b  

^a INFM and Dipto di Fis Corso Italia   (Italy)

^b CNR IMETEM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000848954     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126409     Document Type: Article

References (9)

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