Direct channel length determination of sub-100 nm MOS devices using scanning capacitance microscopy

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1998, Pages 138-139

  Kleiman, R N ^a   O'Malley, M L ^a   Baumann, F H ^a   Garno, J P ^a   Timp, W G ^a   Timp, G L ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MICROSCOPIC EXAMINATION;

DIRECT CHANNEL LENGTH DETERMINATION; SCANNING CAPACITANCE MICROSCOPY (SCM);

MOSFET DEVICES;

EID: 0031619816     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)