Thermal stability and electrical properties of Zr/Si1-x-yGexCy contacts after rapid thermal annealing

Applied Physics Letters

Volumn 73, Issue 9, 1998, Pages 1248-1250

  Aubry Fortuna, V ^a   Eyal, A ^a   Chaix Pluchery, O ^a   Barthula, M ^a   Meyer, F ^a   Eizenberg, M ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000807126     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122141     Document Type: Article

References (19)

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