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Volumn 70, Issue 10, 1997, Pages 1266-1268

Co silicide formation on SiGeC/Si and SiGe/Si layers

a IMEC (Belgium)

e NFWO (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000555333 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.118548 Document Type: Article

Times cited : (56)

References (13)

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