Contacts on Si1-x-yGexCy, alloys: Electrical properties and thermal stability

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1659-1662

  Aubry Fortuna, V ^a   Barthula, M ^a   Perrossier, J L ^a   Meyer, F ^a   Demuth, V ^b   Strunk, H P ^b   Chaix Pluchery, O ^c  

^a CNRS   (France)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^c LABORATOIRE DES MATÉRIAUX ET DU GÉNIE PHYSIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000941754     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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