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Mikrochimica Acta

Volumn 132, Issue 2-4, 2000, Pages 273-288

Quantitative Energy-Filtering Transmission Electron Microscopy (EFTEM)

(4) Hofer, Ferdinand a Grogger, Werner a Warbichler, Peter a Papst, Ilse a

a GRAZ UNIVERSITY OF TECHNOLOGY (Austria)

Author keywords

Analytical electron microscopy; ELNES; Energy filtering TEM; Quantitative elemental maps; Scatter diagram

Indexed keywords

EID: 0000675224 PISSN: 00263672 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (34)

References (63)

1
- 0003394101
- Plenum, New York USA
- R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope. Plenum, New York USA, 1996.
- (1996) Electron Energy-Loss Spectroscopy in the Electron Microscope
- Egerton, R.F.¹

2
- 0003626547
- Center for Solid State Science, Arizona State University. Tempe, USA
- C. C. Ahn, O. L. Krivanek, EELS Atlas, Center for Solid State Science, Arizona State University. Tempe, USA, 1983.
- (1983) EELS Atlas
- Ahn, C.C.¹ Krivanek, O.L.²

3
- 0024641551
- C. Jeanguillaume, C. Colliex, Ultramicroscopy 1989, 28, 252.
- (1989) Ultramicroscopy , vol.28 , pp. 252
- Jeanguillaume, C.¹ Colliex, C.²

4
- 0003521687
- Springer, Berlin Heidelberg New York Tokyo
- L. Reimer (Ed.) Energy-Filtering Transmission Electron Microscopy. Springer, Berlin Heidelberg New York Tokyo, 1995.
- (1995) Energy-Filtering Transmission Electron Microscopy
- Reimer, L.¹

5
- 0026244994
- J. A. Hunt, D. B. Williams, Ultramicroscopy 1991, 38, 47.
- (1991) Ultramicroscopy , vol.38 , pp. 47
- Hunt, J.A.¹ Williams, D.B.²

6
- 0029125937
- F. Hofer, P. Warbichler, W. Grogger, Ultramicroscopy 1995, 59, 15.
- (1995) Ultramicroscopy , vol.59 , pp. 15
- Hofer, F.¹ Warbichler, P.² Grogger, W.³

7
- 0002419039
- R. Castaing, L. Henry, Compt. Rend. Acad. Sci. Paris 1962, B255, 76.
- (1962) Compt. Rend. Acad. Sci. Paris , vol.B255 , pp. 76
- Castaing, R.¹ Henry, L.²

8
- 0016200983
- R. M. Henkelman, F. P. Ottensmeyer, J. Microscopy 1974, 102, 79.
- (1974) J. Microscopy , vol.102 , pp. 79
- Henkelman, R.M.¹ Ottensmeyer, F.P.²

9
- 0016575416
- G. Zanchi, J. P. Perez, J. Sevely, Optik 1975, 43, 495.
- (1975) Optik , vol.43 , pp. 495
- Zanchi, G.¹ Perez, J.P.² Sevely, J.³

10
- 0004137233
- H. Rose, E. Plies, Optik 1974, 4, 336.
- (1974) Optik , vol.4 , pp. 336
- Rose, H.¹ Plies, E.²

11
- 0031423274
- J. Mayer, U. Eigenthaler, J. M. Plitzko, F. Dettenwanger, Micron 1997, 28, 361.
- (1997) Micron , vol.28 , pp. 361
- Mayer, J.¹ Eigenthaler, U.² Plitzko, J.M.³ Dettenwanger, F.⁴

12
- 0002470182
- Electron Spectroscopic Imaging and Diffraction
- M. Rühle, J. Mayer, J. C. H. Spence, J. Bihr, W. Probst, E. Weimer, Electron Spectroscopic Imaging and Diffraction, in Proc. 49th EMSA Meeting, 1991, pp. 706.
- (1991) Proc. 49th EMSA Meeting , pp. 706
- Rühle, M.¹ Mayer, J.² Spence, J.C.H.³ Bihr, J.⁴ Probst, W.⁵ Weimer, E.⁶

13
- 0004040824
- W. Probst, G. Benner, J. Bihr, E. Weimer, Adv. Mater. 1993, 5, 297.
- (1993) Adv. Mater. , vol.5 , pp. 297
- Probst, W.¹ Benner, G.² Bihr, J.³ Weimer, E.⁴

14
- 24944499670
- H. A. Calderon Benavides, M. Jose Yacaman (Eds.) Institute of Physics Publ. Bristol
- G. Benner, R. Härle, H. Niebel, Proc. Int. Congr. Electron Microscopy. In: H. A. Calderon Benavides, M. Jose Yacaman (Eds.) Institute of Physics Publ. Bristol, 1998, Vol. 1, pp. 231.
- (1998) Proc. Int. Congr. Electron Microscopy , vol.1 , pp. 231
- Benner, G.¹ Härle, R.² Niebel, H.³

15
- 0030736695
- K. Tsuni, E. Munro, Rev. Sci. Instrum. 1997, 68, 109.
- (1997) Rev. Sci. Instrum. , vol.68 , pp. 109
- Tsuni, K.¹ Munro, E.²

16
- 0022484844
- H. Shuman, C.-F. Chang, A. P. Somlyo, Ultramicroscopy 1986, 19, 121.
- (1986) Ultramicroscopy , vol.19 , pp. 121
- Shuman, H.¹ Chang, C.-F.² Somlyo, A.P.³

17
- 0000030102
- O. L. Krivanek, A. J. Gubbens, N. Dellby, C. E. Meyer, Microsc. Microanal. Microstruct. 1992, 3, 187.
- (1992) Microsc. Microanal. Microstruct. , vol.3 , pp. 187
- Krivanek, O.L.¹ Gubbens, A.J.² Dellby, N.³ Meyer, C.E.⁴

18
- 0032007805
- A. J. Gubbens, H. A. Brink, M. K. Kundmann, S. L. Friedman, O. L. Krivanek, Micron 1998, 29, 81.
- (1998) Micron , vol.29 , pp. 81
- Gubbens, A.J.¹ Brink, H.A.² Kundmann, M.K.³ Friedman, S.L.⁴ Krivanek, O.L.⁵

19
- 0027981439
- A. L. D. Beckers, W. C. De Bruijn, E. S. Gelsema, M. I. Cleton-Soeteman, H. G. van Eijk, J. Microscopy 1994, 174, 171.
- (1994) J. Microscopy , vol.174 , pp. 171
- Beckers, A.L.D.¹ De Bruijn, W.C.² Gelsema, E.S.³ Cleton-Soeteman, M.I.⁴ Van Eijk, H.G.⁵

20
- 0031251867
- A. L. D. Beckers, W. C. De Bruijn, M. I. Cleton-Soeteman, H. G. van Eijk, E. S. Gelsema, Micron 1998, 28, 349.
- (1998) Micron , vol.28 , pp. 349
- Beckers, A.L.D.¹ De Bruijn, W.C.² Cleton-Soeteman, M.I.³ Van Eijk, H.G.⁴ Gelsema, E.S.⁵

21
- 0002944748
- W. J. De Ruijter, Micron 1995, 26, 247.
- (1995) Micron , vol.26 , pp. 247
- De Ruijter, W.J.¹

22
- 0029316494
- A. L. Weickenmeier, W. Nüchter, J. Mayer, Optik 1995, 99, 147.
- (1995) Optik , vol.99 , pp. 147
- Weickenmeier, A.L.¹ Nüchter, W.² Mayer, J.³

23
- 0000207537
- L. Reimer, I. Fromm, C. Hülk, R. Rennekamp, Microsc. Microanal. Microstruct. 1992, 3, 141.
- (1992) Microsc. Microanal. Microstruct. , vol.3 , pp. 141
- Reimer, L.¹ Fromm, I.² Hülk, C.³ Rennekamp, R.⁴

24
- 0013143858
- Energy Filtering in Electron Microscopy and Electron Diffraction
- B. Siegel (Ed.) Wiley, New York
- R. Castaing, Energy Filtering in Electron Microscopy and Electron Diffraction. Physical Aspects of Electron Microscopy and Microbeam Analysis. In: B. Siegel (Ed.) Wiley, New York, 1975, pp. 287.
- (1975) Physical Aspects of Electron Microscopy and Microbeam Analysis , pp. 287
- Castaing, R.¹

25
- 24944439854
- P. Favard (Eds.)
- P. Henoc, M. Natta, L. Henry, Microsc. Electronique (Paris). In: P. Favard (Eds.) 1970, 2, 123.
- (1970) Microsc. Electronique (Paris) , vol.2 , pp. 123
- Henoc, P.¹ Natta, M.² Henry, L.³

26
- 0026725266
- I. Fromm, L. Reimer, R. Rennekamp, J. Microsc. 1992, 166, 257.
- (1992) J. Microsc. , vol.166 , pp. 257
- Fromm, I.¹ Reimer, L.² Rennekamp, R.³

27
- 0029278225
- J. A. Hunt, M. M. Disko, S. K. Behal, R. D. Leapman, Ultramicroscopy 1995, 58, 55.
- (1995) Ultramicroscopy , vol.58 , pp. 55
- Hunt, J.A.¹ Disko, M.M.² Behal, S.K.³ Leapman, R.D.⁴

28
- 24944568447
- Elemental Mapping Using Energy-Filtered Imaging
- M. M. Disko, C. C. Ahn, B. Fultz (Eds.) Wiley (in print)
- F. Hofer, P. Warbichler, Elemental Mapping Using Energy-Filtered Imaging. Transmission Electron Energy Loss Spectrometry in Materials Science. In: M. M. Disko, C. C. Ahn, B. Fultz (Eds.) Wiley (in print).
- Transmission Electron Energy Loss Spectrometry in Materials Science
- Hofer, F.¹ Warbichler, P.²

29
- 0018251983
- C. Jeanguillaume, P. Trebbia, C. Colliex, Ultramicroscopy 1978, 3, 237.
- (1978) Ultramicroscopy , vol.3 , pp. 237
- Jeanguillaume, C.¹ Trebbia, P.² Colliex, C.³

30
- 0024257021
- N. Bonnet, C. Colliex, C. Mory, M. Tence, Scanning Microscopy Suppl. 1988, 2, 351.
- (1988) Scanning Microscopy Suppl. , vol.2 , pp. 351
- Bonnet, N.¹ Colliex, C.² Mory, C.³ Tence, M.⁴

31
- 0030128867
- F. Hofer, P. Warbichler, Ultramicroscopy 1996, 63, 21.
- (1996) Ultramicroscopy , vol.63 , pp. 21
- Hofer, F.¹ Warbichler, P.²

32
- 0000072114
- A. Berger, H. Kohl, Optik 1993, 92, 175.
- (1993) Optik , vol.92 , pp. 175
- Berger, A.¹ Kohl, H.²

33
- 0032191945
- G. Kothleitner, F. Hofer, Micron 1998, 29, 349.
- (1998) Micron , vol.29 , pp. 349
- Kothleitner, G.¹ Hofer, F.²

34
- 0028466396
- A. Berger, J. Mayer, H. Kohl, Ultramicroscopy 1994, 55, 101.
- (1994) Ultramicroscopy , vol.55 , pp. 101
- Berger, A.¹ Mayer, J.² Kohl, H.³

35
- 0000408349
- A. Berger, H. Kohl, Microsc. Microanal. Microstruct. 1992, 3, 159.
- (1992) Microsc. Microanal. Microstruct. , vol.3 , pp. 159
- Berger, A.¹ Kohl, H.²

36
- 0030871738
- R. F. Egerton, P. A. Crozier, Micron 1997, 28, 117.
- (1997) Micron , vol.28 , pp. 117
- Egerton, R.F.¹ Crozier, P.A.²

37
- 0029619346
- O. L. Krivanek, M. K Kundmann, K Kimoto, J. Microscopy 1995, 180, 277.
- (1995) J. Microscopy , vol.180 , pp. 277
- Krivanek, O.L.¹ Kundmann, M.K.² Kimoto, K.³

38
- 0343815088
- H. A. Calderon Benavides, M. Jose Yacaman (Eds.) Inst. of Physics Publ. Bristol
- B. Freitag, W. Mader, Proc. Int. Congr. Electron Microscopy. In: H. A. Calderon Benavides, M. Jose Yacaman (Eds.) Inst. of Physics Publ. Bristol, 1998, Vol. 1, pp. 221.
- (1998) Proc. Int. Congr. Electron Microscopy , vol.1 , pp. 221
- Freitag, B.¹ Mader, W.²

39
- 0002098539
- Compositional Imaging with Electron Energy-Loss Spectroscopy
- Publ. EMSA
- R. D. Leapman, J. A. Hunt, Compositional Imaging with Electron Energy-Loss Spectroscopy. Microscopy: The Key Research Tool, Publ. EMSA, 1992, Vol. 22, pp. 39.
- (1992) Microscopy: The Key Research Tool , vol.22 , pp. 39
- Leapman, R.D.¹ Hunt, J.A.²

40
- 0027655745
- R. D. Leapman, D. E. Newbury, Anal. Chem. 1993, 13, 2409.
- (1993) Anal. Chem. , vol.13 , pp. 2409
- Leapman, R.D.¹ Newbury, D.E.²

41
- 0024216844
- F. P. Ottensmeyer, D. W. Andrews, A. L. Arsenault, Y. M. Heng, G. T. Simon, G. C. Weatherley, Scanning 1998, 10, 227.
- (1998) Scanning , vol.10 , pp. 227
- Ottensmeyer, F.P.¹ Andrews, D.W.² Arsenault, A.L.³ Heng, Y.M.⁴ Simon, G.T.⁵ Weatherley, G.C.⁶

42
- 0002843641
- F. Hofer, P. Warbichler, Philips Electron Optics Bull. 1996, 134, 1.
- (1996) Philips Electron Optics Bull. , vol.134 , pp. 1
- Hofer, F.¹ Warbichler, P.²

43
- 0030472369
- F. Hofer, P. Warbichler, B. Buchmayr, S. Kleber, J. Microscopy 1996, 184, 163.
- (1996) J. Microscopy , vol.184 , pp. 163
- Hofer, F.¹ Warbichler, P.² Buchmayr, B.³ Kleber, S.⁴

44
- 0002978083
- F. Hofer, P. Warbichler, W. Grogger, O. Lang, Micron 1995, 26, 377.
- (1995) Micron , vol.26 , pp. 377
- Hofer, F.¹ Warbichler, P.² Grogger, W.³ Lang, O.⁴

45
- 0032007473
- P. Warbichler, F. Hofer, P. Hofer, E. Letofsky, Micron 1998, 29, 63.
- (1998) Micron , vol.29 , pp. 63
- Warbichler, P.¹ Hofer, F.² Hofer, P.³ Letofsky, E.⁴

46
- 0000171124
- F. Hofer, G. Kothleitner, Microsc. Microanal. Microstruct. 1993, 4, 539.
- (1993) Microsc. Microanal. Microstruct. , vol.4 , pp. 539
- Hofer, F.¹ Kothleitner, G.²

47
- 24944462761
- Energy-Filtering TEM for Detecting Chemical Defects in Semiconductor Devices
- Inst. Phys. Conf. Ser. in press
- F. Hofer, P. Warbichler, W. Grogger, O. Leitner, Energy-Filtering TEM for Detecting Chemical Defects in Semiconductor Devices. Microscopy of Semiconducting Materials, Inst. Phys. Conf. Ser. (1999) in press.
- (1999) Microscopy of Semiconducting Materials
- Hofer, F.¹ Warbichler, P.² Grogger, W.³ Leitner, O.⁴

48
- 0030670238
- K Kimoto, T. Sekiguchi, T. Aoyama, J. Electron Microscopy 1997, 46, 369.
- (1997) J. Electron Microscopy , vol.46 , pp. 369
- Kimoto, K.¹ Sekiguchi, T.² Aoyama, T.³

49
- 0029056771
- P. A. Crozier, Ultramicroscopy 1995, 58, 157.
- (1995) Ultramicroscopy , vol.58 , pp. 157
- Crozier, P.A.¹

50
- 0343987215
- Quantitative Elemental Concentrations by Energy-Filtered Imaging
- G. W. Bailey, M. H. Ellisman, R. A. Hennigar, N. J. Zaluzec (Eds.) Jones & Begell Publ., New York
- J. Bentley, E. L. Hall, E. A. Kenik, Quantitative Elemental Concentrations by Energy-Filtered Imaging. Proc. Microscopy and Microanalysis. In: G. W. Bailey, M. H. Ellisman, R. A. Hennigar, N. J. Zaluzec (Eds.) Jones & Begell Publ., New York, 1995, pp. 268.
- (1995) Proc. Microscopy and Microanalysis , pp. 268
- Bentley, J.¹ Hall, E.L.² Kenik, E.A.³

51
- 0000522860
- F. Hofer, Microsc. Microanal. Microstruct. 1991, 2, 215.
- (1991) Microsc. Microanal. Microstruct. , vol.2 , pp. 215
- Hofer, F.¹

52
- 0031170942
- F. Hofer, W. Grogger, G. Kothleitner, P. Warbichler, Ultramicroscopy 1997, 67, 83.
- (1997) Ultramicroscopy , vol.67 , pp. 83
- Hofer, F.¹ Grogger, W.² Kothleitner, G.³ Warbichler, P.⁴

53
- 24944484146
- F. Hofer, P. Warbichler, P. B. Anderson, R. Pitonak, Mikrochim. Acta, 1990, II, 243.
- (1990) Mikrochim. Acta , vol.2 , pp. 243
- Hofer, F.¹ Warbichler, P.² Anderson, P.B.³ Pitonak, R.⁴

54
- 0032007799
- W. Grogger, F. Hofer, G. Kothleitner, Micron 1998, 29, 43.
- (1998) Micron , vol.29 , pp. 43
- Grogger, W.¹ Hofer, F.² Kothleitner, G.³

55
- 0000882430
- D. S. Bright, D. E. Newbury, Anal. Chem. 1991, 63, 243.
- (1991) Anal. Chem. , vol.63 , pp. 243
- Bright, D.S.¹ Newbury, D.E.²

56
- 0001737428
- M. Prutton, M. M. El Gomati, P. G. Kenny, J. Electron. Spectrosc. Relat. Phenom. 1990, 52, 197.
- (1990) J. Electron. Spectrosc. Relat. Phenom. , vol.52 , pp. 197
- Prutton, M.¹ El Gomati, M.M.² Kenny, P.G.³

57
- 0003000042
- R. Brydson, EMSA Bull. 1991, 21, 57.
- (1991) EMSA Bull. , vol.21 , pp. 57
- Brydson, R.¹

58
- 12044258512
- D. A. Muller, Y. Tzou, R. Raj, J. Silcox, Nature 1993, 366, 725.
- (1993) Nature , vol.366 , pp. 725
- Muller, D.A.¹ Tzou, Y.² Raj, R.³ Silcox, J.⁴

59
- 0029682631
- J. Mayer, J. M. Plitzko, J. Microsc. 1996, 183, 2.
- (1996) J. Microsc. , vol.183 , pp. 2
- Mayer, J.¹ Plitzko, J.M.²

60
- 0002560241
- H. A. Calderon Benavides, M. Jose Yacaman (Eds.) Inst. of Physics Publ. Bristol
- W. Grogger, P. Warbichler, F. Hofer, T. Lang, W. Schintlmeister, Proc. Int. Congr. Electron Microscopy. In: H. A. Calderon Benavides, M. Jose Yacaman (Eds.) Inst. of Physics Publ. Bristol, 1998, Vol. 2, pp. 215.
- (1998) Proc. Int. Congr. Electron Microscopy , vol.2 , pp. 215
- Grogger, W.¹ Warbichler, P.² Hofer, F.³ Lang, T.⁴ Schintlmeister, W.⁵

61
- 0004832328
- Inner-Shell Ionization
- L. Reimer (Ed.) Springer, Berlin Heidelberg New York Tokyo
- F. Hofer, Inner-Shell Ionization. Energy-Filtering Transmission Electron Microscopy. In: L. Reimer (Ed.) Springer, Berlin Heidelberg New York Tokyo, 1995, pp. 225.
- (1995) Energy-Filtering Transmission Electron Microscopy , pp. 225
- Hofer, F.¹

62
- 0032008084
- F. Hofer, M. A. Pabst, Micron 1998, 29, 7.
- (1998) Micron , vol.29 , pp. 7
- Hofer, F.¹ Pabst, M.A.²

63
- 0031783414
- M. A. Pabst, F. Hofer, Am. J. Phys. Anthropol. 1998, 107, 1.
- (1998) Am. J. Phys. Anthropol. , vol.107 , pp. 1
- Pabst, M.A.¹ Hofer, F.²

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