A post-column imaging energy filter with a 20482-pixel slow-scan CCD camera

Micron

Volumn 29, Issue 1, 1998, Pages 81-87

  Gubbens, Alexander J ^a   Brink, Harold A ^b   Kundmann, Mike K ^b   Friedman, Stuart L ^c   Krivanek, Ondrej L ^d  

^a KLA TENCOR CORPORATION   (United States)

^b GATAN INC   (United States)

^c STANFORD UNIVERSITY   (United States)

^d University of Washington   (United States)

Author keywords

EFTEM; Energy filtering; Imaging energy filter; Post column; Slow scan CCD camera

Indexed keywords

EID: 0032007805     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(97)00075-9     Document Type: Article

References (10)

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