Thermally actuated microbeam for large in-plane mechanical deflections

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 2257-2263

  Kolesar, Edward S ^a   Allen, Peter B ^a   Howard, Jeffery T ^a   Wilken, Josh M ^a   Boydston, Noah C ^a  

^a TEXAS CHRISTIAN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT AIR; BEAM DESIGN; COMPUTER PROGRAM; EXPERIMENTAL OBSERVATION; EXPERIMENTAL PERFORMANCE EVALUATIONS; FINITE ELEMENT ANALYSIS; FINITE ELEMENT MODELING; FORCE MAGNITUDE; IN-PLANE; IN-PLANE MOTION; INTELLICAD; MECHANICAL DEFLECTION; MEMS APPLICATIONS; MEMSDEVICES; MICRO BEAMS; MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS PROCESS; MULTI-USER; NORTH CAROLINA; RESONANT FREQUENCIES; SOFTWARE PROGRAM; THERMAL BEAM; TIP DEFLECTION; TIP FORCES;

FINITE ELEMENT METHOD; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; NATURAL FREQUENCIES; POLYSILICON; THERMAL EXPANSION;

COMPOSITE MICROMECHANICS;

EID: 0000545990     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581757     Document Type: Conference Paper

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