Efficient design and optimization of MEMS by integrating commercial simulation tools

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 15-20

  Nagler, Oliver ^a   Trost, Michael ^a   Hillerich, Bernd ^a   Kozlowski, Frank ^a  

^a IFT INSTITUT FÜR THERAPIEFORSCHUNG   (Germany)

Author keywords

FEA; MEMS; Optimization; Simulation; Software

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; COMPUTER SOFTWARE; FINITE ELEMENT METHOD; OPTIMIZATION;

COMMERCIAL SIMULATION TOOLS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032046894     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00052-1     Document Type: Article

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