Power measurements for radio-frequency discharges with a parallel-plate-type reactor

Journal of the Electrochemical Society

Volumn 145, Issue 5, 1998, Pages 1701-1708

  Kawata, Hiroaki ^a   Kubo, Takashi ^a   Yasuda, Masaaki ^a   Murata, Kenji ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CAPACITORS; ELECTRIC COILS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRIC IMPEDANCE; ELECTRIC REACTORS; ELECTRIC RESISTANCE; ELECTROCHEMICAL ELECTRODES; EQUIVALENT CIRCUITS; OXYGEN; SILICON COMPOUNDS;

PARALLEL PLATE TYPE REACTORS; RADIO FREQUENCY DISCHARGES; SILICON HEXAFLUORIDE;

ELECTRIC POWER MEASUREMENT;

EID: 0032075155     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838543     Document Type: Article

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