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Volumn 272, Issue 1-4 SPEC. ISS., 2004, Pages 161-166

Formation of high-density GaN self-assembled quantum dots by MOCVD

Author keywords

A1. Quantum dots; A1. Stranski krastanow; A3. Metalorganic chemical vapor deposition; B1. Gan

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; DENSITY (SPECIFIC GRAVITY); DENSITY CONTROL (SPECIFIC GRAVITY); GALLIUM NITRIDE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHOTOLUMINESCENCE; SELF ASSEMBLY; WETTING; X RAY DIFFRACTION;

EID: 9944250819     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.08.130     Document Type: Conference Paper
Times cited : (6)

References (18)
  • 16
    • 9944231097 scopus 로고    scopus 로고
    • note
    • The evaporation rate was estimated from XRD spectroscopy for reference samples of GaN/AIN superlattice structures. We grew two samples of 4-period GaN/AIN quantum well structures with and without the growth interruption of 20 s between the GaN/AIN interfaces. The deposition time for the GaN well layer was 50s. The growth conditions of the GaN layer were the same as those of the GaN QDs. The XRD analysis showed that the thickness of the GaN layer was decreased from 1.05 to 0.55 nm by performing the growth interruption. This indicates that the amount of 05nm (1.9ML) of GaN was evaporated for 20s at 990 °C. The blue-shift of the PL peak energy from 4.51 to 4.96 eV due to the growth interruption also confirms the reduction of the well thickness due to the evaporation of the adatoms.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.